Xerox Corporation

Hampshire Instruments, Inc.

Robert G Zambelli

David K Shogren

James M Forsyth

Joseph N May

John F Hoose

Thomas L Duft

Joseph A Abate

Lisa Gregorka

Stephen A Rhinehart

Malcolm M Drummond

An x-ray lithography system is disclosed in which x-rays are generated by directing a high energy laser beam against a metal target to form an x-ray emitting plasma. The x-rays from the plasma are then directed through a mask towards a resist covered wafer to cause a patterned exposure on the wafer resist coating. The mask, the portion of the target which the laser beam strikes and the portion of the wafer to be exposed are all within an evacuated chamber. The laser, prior to entering the chamber, is split into two separate beams, each of which are focused and directed through a window in the side of the chamber towards the same spot on the target. Apparatus, including an air bearing, seal and positioner, is provided to move the target at periodic intervals. Similar apparatus is provided to move the wafer from exposure section to exposure section. The laser beam system includes a face pumped laser beam amplifier and unidirectional beam expanders to allow the maximum energy to be transferred to the laser beam by the amplifier. A series of two or more laser pulses are provided in order to maximize the energy obtained from the laser amplifier. A magnet and a membrane shield are also provided to prevent high energy particles and dust contaminants from the plasma from effecting the lithography process. A materials handling device is provided for moving wafers, targets and masks and an alignment system operating within the evacuated chamber, positions of the wafer with respect to the mask prior to the exposure thereof.

X-ray lithography system

A copying/finisher system is described as having a compiling station for receiving a collated copy set prior to stapling. The compiling station is defined by a reciprocably movable, horizontally arranged collecting plate upon which the copy sheets are collected. The arrangement presents the leading edge of the sheets to the clamping position of one or more staplers. After collection of the copy sheets, the leading edge of the set is clamped and stapled while the plate is moved to permit dropping of the finishing set.

Very high speed duplicator with finishing function

A multi-element lens is enabled by varying the pressure of a gas contained within a central cavity by a piston/cylinder arrangement. During magnification changes, the same mechanism used to change the lens position between an object and image plane is utilized to simultaneously vary the pressure within the lens cavity. The pressure change causes a change in the refractive index of the gas, thereby adjusting the focal length of the lens to the value required by the magnification change.

Gas zoom lens assembly

A document scanning apparatus is disclosed which provides a scan and rescan motion to a scan carriage using only mechanical drive components. Motion of a rotating photoreceptor is transferred, via drive pulley components to a main drive shaft having, in a first embodiment, a pair of pulleys fixedly mounted at the ends. The pulleys drive cables which, in turn, drive the scan carriages of the disclosed system in a scan or rescan direction, dependent upon the drive pulley rotation. The drive pulley rotation is controlled by a movable hub assembly on a drive shaft and by a linkage mechanism which is periodically engaged by the scan carriage at a beginning or end of scan position. Mechanical engagement of the scan carriage with the linkage mechanism causes a reversal of the drive pulley rotation and hence a reversal of the scan carriage direction of travel. In a second embodiment, a rack and gear arrangement is used to drive the scan carriage.

Optical scanning system

A platen cover used in a document reproduction machine is provided with a mechanism for selectively engaging and disengaging a movable registration guide from the platen surface. The movable registration guide cooperates with a fixed guide to provide a corner registered edge for positioning of one size document. For larger documents, the movable guide is engaged by the platen cover and pivoted therewith to permit the larger document to be placed on the platen in a new position which maintains optical system center line.

Document registration apparatus

The invention discloses an imaging system for a reproduction device for reproducing a document at reduced or enlarged magnification, as well as unity magnification. The system includes at least two linear lens arrays, one lens array providing the 1:1 magnification and the second array adapted to provide a reduced or enlarged image depending upon its vertical orientation. Mechanical arrangements are disclosed which translate a magnification selection into the position of the appropriate lens array into the optical path. This positioning includes both horizontal and rotational movement of the lens arrays. A magnification selection also enables a platen (or document) drive system which selects the proper document scanning speed for that magnification. In a disclosed embodiment the linear lens arrays are gradient index lens arrays.

Multi-magnification reproduction device utilizing linear lens assembly

A compact scan document system is enabled by adding motion to the scanning and projection components used in a folded optical system. A general and preferred velocity relationship is set for the system optical elements and a mechanical drive arrangement is disclosed which enable the specific ratios required. In a preferred embodiment, a pulley/belt system is used to provide four velocities such that a document is scanned at a first velocity V, the document image is reflected to a folding mirror arrangement traveling at 0.75 V and projected by a lens moving at a 0.5 V velocity to a photoreceptor image plane via another folding mirror arrangement moving at a 0.25 V ratio.

Growing community of inventors

Rochester, NY, United States of America

Robert G Zambelli