3m Innovative Properties Company

Minnesota Mining and Manufacturing Company

Hexcel Corporation

Robert G Smith

Billy Lee Weaver

Mike E Hamerly

Silva K Theiss

Kathy L Hagen

Douglas P Goetz

Joseph H Eaton

Edward M Fischer

Venecia M Grobelny

Kevin D McVicker

Larry R Visser

Terry Lee Smith

Daniel B Pendergrass, Jr

Barry S Carpenter

Raymond C Chiu

A packaged optical micro-mechanical device. A die includes one or more optical micro-mechanical devices on a first surface of a substrate. The first surface includes a die reference surface. A package frame includes an aperture and a package frame reference surface proximate the aperture adapted to receive the die reference surface such that the optical micro-mechanical devices are located in the aperture. One or more V-grooves are positioned relative to an optical interface reference plane adjacent to the micro-mechanical devices and terminating adjacent to the aperture. One or more optical fibers are located in the V-grooves optically coupled with one or more of the optical micro-mechanical devices.

Packaged optical micro-mechanical device

A micrometer sized, single-stage, vertical thermal actuator capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above the hot arm relative to the surface. A member mechanically and electrically couples the free ends of the hot and cold arms such that the member moves away from the substrate when current is applied to at least the hot arm. The hot arm can optionally include a grounding tab to minimize thermal expansion of the cold arm.

Direct acting vertical thermal actuator

A MEMS-based device to steer and manipulate beams of light traveling in free-space in an optical switch. The optical switch is based on a rotating vertical micro-mirror constructed on a surface of a substrate. At least one input optical fiber is arranged to direct at least one optical signal through free-space along a first optical path parallel to the surface of the substrate. A plurality of output optical fibers are arranged to receive the optical signal traveling through free-space along other optical paths not co-linear with the first optical path. At least one substantially vertical, rotating micro-mirror assembly is constructed on the substrate. The assembly includes a rotating micro-mirror with a vertical centerline and an axis of rotation both perpendicular to the surface, but not co-linear. The rotating micro-mirror is rotatable between a first position not in the first optical path and at least a second position redirecting the optical signal to one of the output optical fibers.

Optical switch based on rotating vertical micro-mirror

A micro-mechanical device including a gimbaled micro-mirror position able by a one or more thermal actuators. The thermal actuators are not attached to the micro-mirror. Rather, the micro-mirror is retained to the substrate by one or more gimbals. The micrometer sized thermal actuators are capable of repeatable and rapid moving the micro-mirror out-of-plane to accurately and repeatably steer a beam of light.

Gimbaled micro-mirror positionable by thermal actuators

A micrometer sized, single-stage, vertical thermal actuator with controlled bending capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above the hot arm relative to the surface. The cold arm is adapted to provide controlled bending near the first end thereof. A member mechanically and electrically couples the free ends of the hot and cold arms such that the actuator bends generally at the flexure so that the member moves away from the substrate when current is applied to at least the hot arm.

Direct acting vertical thermal actuator with controlled bending

A micrometer sized, single-stage, horizontal and vertical thermal actuator capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The horizontal and vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above and laterally offset from the hot arm relative to the surface. The cold arm is adapted to provide controlled bending near the first end thereof. A member mechanically and electrically couples the free ends of the hot and cold arms such that the actuator exhibits horizontal and vertical displacement when current is applied to at least the hot arm.

Combination horizontal and vertical thermal actuator

A polarization mode separator separates the optical signal into a first polarized signal and a second differently polarized signal traveling along respective first and second paths. A first variable delay generator located along the first path is adapted to selectively provide a first propagation delay to the first polarized signal. The first variable delay generator includes at least two rotating micro-mirrors and one or more fixed mirrors constructed on a surface of a substrate. A controller is coupled to the first variable delay generator. The controller is adapted to monitor the polarization mode dispersion in the optical signal and to position the rotating micro-mirrors to direct the first polarized signal along one of the plurality of optical paths. A beam combiner combines the first and second signals to form an optical output signal substantially compensated for polarization mode dispersion.

MEMS-based polarization mode dispersion compensator

A micrometer sized multi-directional thermal actuator capable of repeatable and rapid displacement in a substantially horizontal direction, a substantially vertical direction, and/or a combination thereof. The multi-directional thermal actuator constructed on a surface of a substrate includes three or more beams each cantilevered from one or more anchors at a first end to extend generally parallel to the surface of the substrate. A member mechanically and electrically couples the distal ends of the beams. Application of current to a circuit comprising combinations of any two or more of the beams displaces the member in one of three or more non-parallel radial directions, respectively.

Multi-directional thermal actuator

Fluid permeable candle filter comprising a self supporting tube a filter layer and a filter layer. The self supporting tube comprises ceramic oxide fibers and silicate ceramic oxide bonding phase. The filter layer comprises non-woven ceramic oxide fibers and silicate ceramic oxide bonding phase

Candle filter

Fluid permeable filter material comprising a self supporting fluid permeable wall and a fluid permeable filter layer. The self supporting wall comprises ceramic oxide fibers, ceramic oxide particles, and silicate ceramic oxide bonding phase. The filter layer comprises non-woven ceramic oxide fibers and silicate ceramic oxide bonding phase.

Filter material

A composite ceramic wafer including a beta silicon carbide layer. The composite ceramic wafer is useful for making thin film magnetic heads.

Ceramic wafers and thin film magnetic heads

This invention provides a shaped ceramic composite article comprising ceramic oxide fiber(s), a first coating comprising a carbonaceous matrix which includes boron nitride particles in contact therewith, and a second coating comprising silicon carbide. The inventive composite article is useful in applications requiring good heat resistance and mechanical properties, such as gas fired radiant burner tubes, gas burner nozzle liners, heat exchangers, thermowells, core busters or flame dispersers, and other gas fired furnace components.

High temperature ceramic composite

Disclosed is candle filter assembly including a candle filter for the filtration of particulates from a fluid. The candle filter is constructed of ceramic fibers and includes a gimbal mount. The candle filter is pivotally supported, and is mounted so as to redirect axial compressive forces into compressive through wall compressive forces. Also disclosed is a filtration system including a plurality of such candle filter assemblies mounted in an enclosure.

Growing community of inventors

Vadnais Heights, MN, United States of America

Robert G Smith