Honeywell G.m.b.h.

Other

Robert G Ahonen

John Malenick

Hans P Meyerhoff

Delmer L Smith

Thomas M Crook

A device for depositing a high quality thin film of material upon a surface is disclosed. The device is particularly adaptable to the construction of mirrors since it allows for coating of alternating layers of material. The quality of the film deposited is greatly improved by placing the substrates adjacent to the target surface and not directly in front of it. Furthermore, the substrates are rotated to improve uniformity of the coating.

Off-axis radio frequency diode apparatus for sputter deposition of RLG

An apparatus for monitoring ion beams with an electrically isolated aperture includes an ion beam source for generating an ion beam and an electrically conductive aperture plate arranged to collimate the ion beam. The aperture plate is electrically isolated from the rest of the deposition apparatus and is divided into a plurality of electrically isolated segments. A current monitoring device has an input connected to the aperture plate so as to monitor current from the aperture plate which is indicative of the ion beam performance.

Apparatus for monitoring ion beams with an electrically isolated aperture

The present invention discloses a method to deposit thin films on a substrate. An inert gas is introduced into a radio-frequency excited ion beam gun. The ions thus produced are directed to a target where molecules of the target are sputtered off and deposited on a substrate. A method of translating different targets into the ion beam is provided in order to produce multilayer films with different properties in each layer. A method is also provided to rotate the substrates into and out of the path of the sputtered molecules to insure a uniform film.

Method to deposit multilayer films

The present invention discloses an apparatus to deposit thin films on a substrate. An ion beam produced by an ion gun, which is radio-frequency excited, impinges upon a target. The target is translatable laterally by a target holder to bring different target materials into contact with the ion beam. The targets are held at an angle to the ion beam. The target material sputtered off the target by collision with the ions is deposited on substrates held above the targets. The substrates are moved into and out of the path of the sputtered material by an unique rotating device for uniform deposition of the sputtered material.

Apparatus to deposit multilayer films

The present invention discloses an ion beam gun wherein the ions are produced by radio-frequency excitation. A plasma is created in a vessel, or chamber, by ionizing gas molecules by means of a coil about the outside of the vessel. The coil receives radio-frequency energy which ionizes the gas molecules. The inside of the vessel contains an anode and resonator to assist in shaping and containing the plasma. The resonator acts as an internal electrode to produce eddy currents generated by the radio-frequency energy to enhance the plasma. A multi-apertured screen grid also helps contain and shape the plasma within the chamber while a multi-apertured accelerator grid is used to extract the ions from the ion beam gun.

Ion beam gun

A ring laser angular rate sensor is constructed from a solid block with mirror assemblies joined to the block a by thermally formed and gas tight seal comprised of a thin film of glass.

Low cost ring laser angular rate sensor including thin fiber glass

Low cost ring laser angular rate sensor

Discloses a mirror chip and mirror assembly for ring laser angular rate sensors. A mirror assembly utilizes a silicon substrate upon which is deposited in mirror material. The silicon substrate is then affixed to a second substrate by a thermally sealable bonding agent.

Growing community of inventors

Cedar, MN, United States of America

Robert G Ahonen