Carl Zeiss Smt Gmbh

Robert Fichtl

Franz-Josef Stickel

Joachim Hartjes

Kerstin Hild

Manfred Matena

Marc Saitner

Hans-Peter Brust

A method for the zonal polishing of a workpiece includes using a polishing tool to guide a structured polishing pad over the surface of workpiece to remove material from the workpiece. A structured polishing pad includes a structuring adapted to the movement of a polishing tool.

Method for machining a workpiece in the production of an optical element

A method for producing an optical element includes: providing a substrate (), applying a layer system (), wherein an optically effective surface () is formed and wherein the layer system has a layer () that is thermally deformable for manipulating the geometric shape of the optically effective surface, and applying a temperature field to the optical element while at least regionally heating the thermally deformable layer to above a specified operating temperature of the optical system. The thermally deformable layer is configured such that a deformation that is induced when the temperature field is applied is at least partially maintained after the optical element has cooled. Also disclosed is an optical element () that has an optically effective surface (), a substrate (), and a layer system () that has a reflection layer system (), which includes a shape-memory alloy.

Method for producing an optical element for an optical system, in particular for a microlithographic projection exposure apparatus

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Aalen, Germany

Robert Fichtl