Microelectronics and Computer Technology Corporation

Teravicta Technologies, Inc.

Robert F Miracky

Colin A MacKay

Claude Hilbert

Tom J Hirsch

Joan E Yater

Thomas W Rudwick, Iii

Kai Hu

Kantesh Doss

Jason D Reed

Scott C Sommerfeldt

Bryan Seppala

An apparatus and method of fabricating and operating a micro-electromechanical systems (MEMS) integrated optical structure is disclosed. Micro-optics is integrated with MEMS actuators to provide a building block for a micro-optical communication device. Such micro-optical communication device may realize a variety of optical communication systems including optical interconnects, laser communications, or fiber optic switches. In accordance with one aspect of the present invention, a micro-optical element such as a micro-lens is advantageously integrated with an actuator such as MEMS comb drive actuator to form a MEMS lens assembly. The MEMS lens assembly is further coupled to an optical source which may provide a MEMS integrated micro-optical communication device. This integration substantially obviates the generally needed external or manual positioning of the micro-optical element to align a light beam or an optical signal being emitted from the optical source. The MEMS comb drive actuator, responsive to an actuation force, selectively positions the micro-optical element. By appropriately micro positioning a micro-optical element such as a micro-lens relative to an optical source, such as an input optical fiber or a laser diode, a focused light beam or an optical signal may be coupled to a respective optical fiber or a detector. In one embodiment, a commonly used flip chip module assembly technique may be adapted for bonding the MEMS lens assembly to a carrier substrate, which preferably receives the optical source. The carrier substrate is generally disposed on a host assembly. A flip chip based passive alignment of the MEMS lens assembly could be provided. Additionally, an active alignment of the light beam or optical signal with an optical detector may be provided, which can be maintained through a feedback loop.

Integrated optical micro-electromechanical systems and methods of fabricating and operating the same

Provided is an electrical interconnect cell intermittently spaced across a substrate to form an interconnect device or structure. The interconnect device is fully customizable or programmable upon the upper surface to accommodate various electrical components and connectivity to those components. The electrical interconnect device includes a plurality of intermittently spaced first pairs of upper and lower signal lines interwoven with a plurality of intermittently spaced second pairs of upper and lower signal lines. A bonding pad is arranged between adjacent upper and lower signal line pairs and can be connected thereto with conductive links placed upon the surface layer. Each bonding pad includes one or more pad vias which extend perpendicular to the upper surface to conductive structures arranged in lower layers. Approximately one-half of the array of bonding pads are connected to potential conductors. The pairs of upper signal lines can not only be linked, but also can be cut to form a more direct routing between target locations. Moreover, the upper and lower signal lines are connected in order for traces to extend across the entire interconnect structure for ease of testability.

Electrical interconnect device with customizeable surface layer and

A method of depositing micron-sized metal lines on a dielectric substrate, such as polyimide. The dielectric is covered with a thin metallic layer, of a first metal placed in a reaction cell containing a gas-phase molecular species containing a second metal, and exposed to a focused laser beam. A translation stage moves the dielectric relative to the beam to selectively deposit micron-sized second metal lines on the metallic layer. The metallic layer on the unirradiated portion of the substrate is subsequently etched away, leaving the lines adhered to the dielectric surface.

Method of depositing conductive lines on a dielectric

Solder reflow on an electrical interconnect substrate between a plurality of electrical contacts. The method includes coating the contacts with tin/lead solder, depositing a wetting metal between the contacts, and heating the substrate to at least the melting point of the solder so that the solder melts, reflows across the wetting metal and connects or links the contacts. The entire surface of a customizable copper/polyimide substrate can be personalized by solder links and TAB leads from surface-mounted integrated circuits can simultaneously be soldered to the substrate.

Method of patterned metal reflow on interconnect substrates

A method for forming connections between copper conductors disposed on a substrate includes the steps of coating the copper conductors with a layer of nickel, exposing the coated copper conductors to a gas which includes a tungsten-bearing compound, and irradiating the substrate with a laser beam to deposit the tungsten between the copper conductors. A system for forming connections between copper conductors disposed on a substrate, includes means for coating the copper conductors with a layer of nickel, means for exposing the coated copper conductors to a gas which includes a tungsten-bearing compound, and means for irradiating the substrate with a laser beam to deposit the tungsten between the copper conductors.

Method for forming electrical connections between copper conductors

A process for laser-assisted liquid phase etching of copper conductors which includes the use of a solution of sulfuric acid and hydrogen peroxide in contact with an integrated circuit substrate and the provision of a laser beam to select substrate areas having copper conductors to be etched. Also disclosed is an apparatus for the laser-assisted etching.

Growing community of inventors

Cedar Park, TX, United States of America

Robert F Miracky