Optical Coating Laboratory, Inc.

Robert F Klinger

Eric R Dickey

Richard Ian Seddon

Bryant P Hichwa

Michael A Scobey

Michael D Temple

James W Seeser

Paul M LeFebvre

David L Soberanis

Thomas H Allen

Rolf F Illsley

Craig C Van Horn

Patrick R Wentworth

A thin film coating system incorporates separate, separately-controlled deposition and reaction zones for depositing materials such as refractory metals and forming oxides and other compounds and alloys of such materials. The associated process involves rotating or translating workpieces past the differentially pumped, atmospherically separated, sequentially or simultaneously operated deposition and reaction zones and is characterized by the ability to form a wide range of materials, by high throughput, and by controlled coating thickness, including both constant and selectively varied thickness profiles.

Geometries and configurations for magnetron sputtering apparatus

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Rohnert Park, CA, United States of America

Robert F Klinger