Optron Systems, Inc.

Sparta, Inc.

Lumen Laboratories, Inc.

Asml Netherlands B.v.

General Scanning, Inc.

Optron System, Inc.

Robert F Dillon

Cardinal Warde

Philip Dennis Henshaw

Pierre C Trepagnier

Wouter Onno Pril

Michael B Michalik

Engelbertus Antonius F Van De Pasch

Brian A Hill

The present invention generally provides systems and methods for distribution of radiation among a plurality of optical channels, each of which can include a non-linear optical element. An optical system of the invention can include a source for generating radiation and an optical time-division multiplexer that can deflect, at any given time interval, the radiation into one of a plurality of optical channels.

Method and apparatus for time-division multiplexing to improve the performance of multi-channel non-linear optical systems

Measurements of an interferometric measurement system are corrected for variations of atmospheric conditions such as pressure, temperature, and turbulence using measurements from a second harmonic interferometer (SHI). A ramp, representing the dependence of the SHI data on path length, is removed before utilizing the SHI data. The SHI may include a passive Q-switched laser as a light source and Brewster prisms in the receiver module. Optical fibers may be used to conduct light to the detectors. A mirror reflecting the measurement beams has a coating of a thickness selected to minimize the sensitivity of the SHI data to changes in coating thickness.

Enhanced lithographic displacement measurement system

A system that projects a multi-color laser beam image based on assembly or alignment data of a manufacturing process onto a work surface. The system provides, for example, an optical layup template in manufacturing processes, especially the layup of composite laminates. In various implementations additional important features are shown. A plurality of lasers emit beams of different colors, including colors different from that emitted by any one laser. In certain implementations, the system comprises a red and a green laser adapted to emit red, green and yellow laser beams. Software to control the system is also disclosed.

Multi-color laser projector for optical layup template and the like

An improved interferometer measuring system that corrects for errors in the determination of the position of a measurement reflector along a measurement path due to the presence of an atmosphere (e.g. atmospheric turbulence) along the path is disclosed. The system includes a two-wavelength interferometer for measuring the atmosphere and a basic length interferometer for a basic measurement of a change in position of the measurement reflector. A calibration procedure for correcting the basic measurements made by the basic length interferometer uses first and second correction coefficients related to the average refractivity of the atmosphere and the change in the refractivity of the atmosphere, respectively. The coefficients can be determined by interferometric measurements or from a combination of interferometric measurements and data from an atmospheric sensor(s), including a humidity sensor. The two-wavelength interferometer can include a pulsed laser source, a compact reference path element, and path length adjustment element. An algorithm is disclosed for efficiently determining the phase difference between the two beams of the two-wavelength interferometer. Beam combining techniques and apparatus for combining the beams of the two-wavelength interferometer and the basic length measurement interferometer while preserving the polarization of the laser beams are also disclosed. The data obtained from the two-wavelength interferometer can be corrected, based on measurements made by the basic length interferometer, for aging due to the movement of the reflecting mirror subsequent to measurement of the atmosphere by the two-wavelength interferometer.

Interferometer with air turbulence compensation

A phase detector includes a mixer circuit responsive to an input signal and a reference signal to produce an error signal which is a function of the phase difference between the input signal and the reference signal; a phase shifting circuit varies the phase difference between the input and reference signals; a control circuit responsive to the error signal provides a drive signal to the phase shifting circuit to set to quadrature the phase difference between the input and reference signals; and a phase indicator device responsive to the drive signal indicates the phase difference between the component and reference signals.

Phase detector

The disclosed charge transfer signal processor includes a vacuum housing having an input face and an output face, a 2-D electromagnetic input means cooperative with said input face for providing a 2-D input electronic charge signal within the vacuum housing, transfer means for imaging the 2-D input electronic charge signal in a region of the vacuum housing proximate the vacuum housing output face, and charge feedthrough means coupled to the vacuum housing output face for transferring the imaged 2-D electronic charge signal externally to the vacuum housing. In one embodiment, the charge transfer signal processor is operable as Gen-1 charge transfer amplifier. In another embodiment, a microchannel plate assembly is disposed in the vacuum housing intermediate the input and output faces, and the charge transfer signal processor is operable as a high-gain charge transfer signal amplifier. In a futher embodiment, a power microchannel plate assembly is disclosed that is disposed in the vacuum housing intermediate the input and output faces, and the charge transfer signal processor is operable as a high-current charge transfer signal amplifier. The disclosed power microchannel plate assembly preferably includes a 2-D array of axially-aligned discrete dynodes, and a voltage divider network operatively coupled to the 2-D array for providing an electron accelerating potential gradient and for replacing charge as it is depleted by secondary electron emission processes in the several discrete dynodes. The 2-D input electromagnetic signal may either be optical, electronic, or a combination of these two. Various output devices externally mounted to the output face of the vacuum housing are disclosed. Utility includes spatial phase and/or amplitude light modulation, 2-D optical signal processing, and, among others, electromagntic signal detection. A method and an apparatus are disclosed for fabricating the charge feedthrough means.

Charge transfer signal processor and charge transfer feedthrough plate

In one voltage-driven embodiment, a high spatial resolution two-dimensional array of bistable completely cross-talk free light modulation elements is constituted as a lamination of an input two-dimensional photoconductor thin film layer and an output two-dimensional electroluminescent phosphor thin film layer disposed in etched wells individually defined in corresponding cores of the optical fibers of a fiber optic face plate. In another voltage-driven embodiment, a very low cost high spatial resolution 2-D array of bistable substantially cross-talk free light modulation elements is constituted as a lamination of a photoconductor thin film layer, a selectively dimensioned and apertured opaque masking thin film layer, and an electroluminescent phosphor thin film layer. In an electron-driven embodiment, a high spatial resolution two-dimensional array of substantially cross-talk free bistable light modulating elements is constituted as an assembly of a two-dimensional input window having a deposited photocathode thin film layer, a two-dimensional output window having a deposited cathodoluminescent phosphor, and a two-dimensional glass capillary array defining plural charge feed forward and light feedback channels mounted therebetween in a vacuum tight enclosure. In a further electron driven embodiment, a microchannel plate subassembly is mounted in the vacuum-tight enclosure in the place of the glass capillary array. In the several embodiments, voltages are applied via transparent conductors to the photoconductor and phosphor layers.

High spatial resolution 2-D bistable light modulator

In one voltage-driven embodiment, a high spatial resolution two-dimensional array of bistable completely cross-talk free light modulation elements is constituted as a lamination of an input two-dimensional photoconductor thin film layer and an output two-dimensional electroluminescent phosphor thin film layer disposed in etched wells individually defined in corresponding cores of the optical fibers of a fiber optic face plate. In another voltage-driven embodiment, a very low cost high spatial resolution 2-D array of bistable substantially cross-talk free light modulation elements is constituted as a lamination of a photoconductor thin film layer, a selectively dimensioned and apertured opaque masking thin film layer, and an electroluminescent phosphor thin film layer. In an electron-driven embodiment, a high spatial resolution two-dimensional array of substantially cross-talk free bistable light modulating elements is constituted as an assembly of a two-dimensional input window having a deposited photocathode thin film layer, a two-dimensional output window having a deposited cathodoluminescent phosphor, and a two-dimensional glass capillary array.

Low-cost, substantially cross-talk free high spatial resolution 2-D

Completely cross-talk free high spatial resolution 2D bistable light

The disclosed charge transfer signal processor includes a vacuum housing having an input face and a output face, a 2-D electromagnetic input means cooperative with said input face for providing a 2-D input electronic charge signal within the vacuum housing, transfer means for imaging the 2-D input electronic charge signal in a region of the vacuum housing proximate the vacuum housing output face, and charge feedthrough means coupled to the vacuum housing output face for transferring the imaged 2-D electronic charge signal externally to the vacuum housing. In one embodiment, the charge transfer signal processor is operable as a Gen-I charge transfer amplifier. In another embodiment, a microchannel plate assembly is d

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Stoneham, MA, United States of America

Robert F Dillon