Silicon Technology Corporation

Robert E Steere

Thomas Lewandowski

The saw blade mount is provided with a stabilizer blade mount for imposing an axial force on the saw blade to eliminate unevenness in the saw blade. The stabilizer blade mount includes a gasket ring of plastic or elastomeric material which is abutting against the saw blade and which faces an opposing surface of an inner clamping ring. Adjustment screws permit adjustment of the stabilizing ring relative to the saw blade either completely about the periphery or only at localized regions.

Blade mount for inner diameter saw blade

The edge profile machine employs a centering station in which a photosensor measures a number of points on the periphery of a wafer so that the shape of the wafer and location of the geometric center can be determined in a computer. A rotatable head serves to position the geometric center of the wafer on a fixed axis and the wafer transferred to a grinding station with the geometric center located on the central axis of a rotating chuck. During grinding, a grinding wheel is moved in accordance with the differences between the detected shape of the wafer and a predetermined shape. The grinding wheel is moved on an axis perpendicular to an axis passing through the centering station and grinding station in accordance with signals received from the computer.

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Parsippany, NJ, United States of America

Robert E Steere