Massachusetts Institute of Technology

Robert E Knowlden

Patrick N Everett

William C Goltsos

A technique for measuring the distance between the edges of a feature positioned on a substrate wherein the feature is illuminated with light on either side of the edges and the light intensities at either side of each of the edges are detected and are balanced at the detected light intensities regions sufficiently removed from the edges to prevent an adverse diffractive effect thereon so as to produce regions of minimum light intensity at the edges, the positions of which can be determined and the distance between said regions of minimum intensity can be measured.

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Waltham, MA, United States of America

Robert E Knowlden