Air Products and Chemicals, Inc.

Robert E Fletcher

Hans-Juergen Graf

Bruce A Lipisko

Richard E Howard

Peter T Randtke

John C Schumacher

Adrian Sandu

Peter T Randke

J R Monkowski

Bruce E Rhine

A gas piston liquid flow controller comprising a pumping chamber of fixed volume, means to separately introduce into said chamber pressurized gas and liquid, means to detect the presence of liquid at predetermined upper and lower levels in said chamber, means to withdraw a stream of liquid from said chamber for delivery to a point of use and a controller to maintain liquid in said chamber to effect constant delivery of liquid to the point of use.

Gas piston liquid flow controller

A system for automatically filling a bubbler, or other vapor delivery system from a reservoir, is disclosed in which the conduit system is purged and pressurized with inert gas, using a unique refill reservoir, level sensing and valving system.

Chemical refill system

A vacuum vapor transport control system and method for controlling the rate of vapor flow from a reagent reservoir into a vacuum system through an orifice calibrated as to size or flow rate using a high purity fixed gas and vapor provided from multiple reservoirs or mixed vapor provided from a single reservoir.

Vacuum vapor transport control

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Vista, CA, United States of America

Robert E Fletcher