At&t Bell Laboratories

At+t Corp.

Robert E Betzig

Jay K Trautman

Raymond Wolfe

Ernst M Gyorgy

Stephen G Grubb

David A Miller

Harald F Hess

Igal M Brener

Apparatus and methods of near-field scanning optical microscopy (NSOM) are described. A sensing technique is used, in which a light source having an optical cavity is reflectively coupled to the sample surface. Changes in the surface properties of the sample at the sensed location alter the optical feedback in the light source. This leads to detectable changes in the output characteristics of the light source.

Method and apparatus for near-field, scanning, optical microscopy by

An optical system useful, e.g., for near-field scanning optical microscopy is provided. The system incorporates a probe having improved properties. In one embodiment, the probe comprises a tapered and partially metallized portion of a single-mode optical fiber.

Manufacturing method including near-field optical microscopic

Manufacturing method including photoresist processing using a near-field

Manufacturing method, including near-field optical microscopic

Near-field optical microscopic examination of genetic material

Data recording using a near field optical probe

Near field optical microscopic examination of a biological specimen

Near field scanning optical microscope having a tapered waveguide

A scanning, imaging system is described. A probe having a fine tip is disposed adjacent the surface of a sample and scanned in a pattern lying in a plane substantially parallel to the surface. Means are provided for oscillating the probe tip, substantially within the scanning plane. Shear forces, acting upon the probe tip in a substantially lateral direction, cause changes in the oscillation of the probe tip. Such changes are detected by a position-sensitive photodetector.

Scanning microscope comprising force-sensing means and

A novel probe, useful for near-field optical scanning microscopy, is provided. The probe has a fine tip which includes fluorescent material. In one embodiment, the invention is an apparatus which includes such a probe, means for exciting and detecting fluorescence in the probe tip, means for positioning the probe tip near the surface of a sample, and means for displacing the probe tip relative to the sample. In a second embodiment, the invention is a manufacturing method in which the novel probe is used to measure a characteristic dimension of a patterned workpiece.

Near-field scanning optical microscope using a fluorescent probe

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Chatham, NJ, United States of America

Robert E Betzig