National Semiconductor Corporation

Eastman-kodak Company

Foveon, Inc.

Robert Drury

Peter J Hopper

Michael Mian

Peter B Johnson

Kyuwoon Hwang

Vladislav Vashchenko

Philipp Lindorfer

Jim McGinty

William David French

James McGinty

The radio frequency (RF) impedance of a metal trace at gigahertz frequencies is reduced by forming the metal trace to have a base region and a number of fins that extend away from the base region. When formed in a spiral configuration having a number of loops, the metal trace forms an inductor with an increased quality factor (Q).

Conductive trace with reduced RF impedance resulting from the skin effect

In an on chip battery and method of making an on-chip battery, the electrodes are formed from metal layers deposited as part of the chip fabrication process. An electrolyte is preferably introduced between the electrodes at time of packaging of the chip.

On chip battery

The loss of photogenerated electrons to surface electron-hole recombination sites is minimized by utilizing a first p-type surface region to form a depletion region that functions as a first barrier that repels photogenerated electrons from the surface recombination sites, and a second p-type surface region that provides a substantial change in the dopant concentration.

Method of forming a photodiode that reduces the effects of surface recombination sites

A very, very low resistance micro-electromechanical system (MEMS) inductor, which provides resistance in the single-digit milliohm range, is formed by utilizing a single thick wide loop of metal formed around a magnetic core structure. The magnetic core structure, in turn, can utilize a laminated Ni&#x2014;Fe structure that has an easy axis and a hard axis.

Method of forming a MEMS inductor with very low resistance

An on-chip inductor structure includes top and bottom metal plates that are formed to surround a conductor coil formed between the top and bottom plates, but is separated therefrom by intervening dielectric material. The top and bottom plates are preferably formed from a ferromagnetic alloy, e.g. Permalloy, and are subdivided into a plurality of space-apart segments, thereby reducing eddy currents. The number of segments is optimized based upon the process technology utilized to fabricate the structure. Preferably, a finite gap is formed between the top plate and the bottom plate, the height of the gap being chosen to adjust the total inductance of the structure.

Patterned magnetic layer on-chip inductor

A pressure sensing system formed in a monolithic semiconductor substrate. The pressure sensing system comprises a pressure sensing device formed on the monolithic semiconductor substrate. The pressure sensing device is adapted to be disposed in an environment for developing an electrical pressure signal corresponding to the pressure in the environment. The system includes driver circuitry formed in the monolithic semiconductor substrate. The driver circuitry is responsive to input electrical signal for generating an output pressure signal. A conductive interconnect structure formed in the monolithic semiconductor substrate to electrically connects the pressure sensing device to the driver circuitry such that electrical pressure signals developed by the pressure sensing device are provided as input electrical signals to the driver circuitry.

MEMS pressure sensing device

A method is provided for forming the ferromagnetic core of an on-chip inductor structure. In accordance with the method, a static, permanent magnet is placed in proximity to a semiconductor wafer upon which the ferromagnetic core is being electroplated. The permanent magnet is place such that the magnetic field is orthogonal to the wafer. The 'easy' axis material is that plated parallel parallel to the magnet's field and saturates at a lower applied field. The 'hard' axis is that plated perpendicular to the applied magnetic filed and saturates later, at a higher current level. This plating approach results in optimum magnetic alignment of the ferromagnetic core so as to maximize both the field strength/magnetic flux slope and magnitude before magnetic material saturation occurs.

Method of improving on-chip power inductor performance in DC-DC regulators

A wireless tire pressure sensing system based upon a Schrader valve design is provided. The system includes a valve body, a valve pin and a compression element for sealing engaging the valve body and the valve pin to maintain tire pressure. A pressure sensing device mounted within the valve body and connected to valve pin senses the pressure within the tire and provides its signal to the valve pin. The valve pin is adapted as a component of an antenna that transmits a wireless pressure signal to a remote receiver/transmitter mounted on the vehicle. The receiver/transmitter transmits a corresponding signal to a vehicle control system that generates a warning signal when the tire pressure is below a threshold safety value.

Wireless pressure sensing Schrader valve

The RF impedance of a metal trace at gigahertz frequencies is reduced by forming the metal trace to have a base region and a number of fingers that extend away from the base region. When formed to have a number of loops, the metal trace forms an inductor with an increased Q.

Method of forming a metal trace with reduced RF impedance resulting from the skin effect

The sensitivity of a MEMS microphone is substantially increased by using a portion of the package that holds the MEMS microphone as the diaphragm or a part of the diaphragm. As a result, the diaphragm of the present invention is substantially larger, and thus more sensitive, than the diaphragm in a comparably-sized MEMS microphone die.

MEMS microphone

Improvements in the level of integration of a core buck and/or boost DC-DC voltage regulator sub-circuit lead to a lower manufacturing cost structure, an improved performance from lessened intrinsic parasitic resistance, a smaller die size and, thus, higher wafer yield. Further, by integrating certain components on-chip, the cost and complexity of the conventional hybrid circuit implementation is improved.

Integrated switching voltage regulator using copper process technology

MEMS inductor with very low resistance

An inductor-based integrated MEMS microphone and a method of making the microphone is provided. The microphone structure includes a vibrating inductor that is suspended over another stationary inductor such that the magnetic field induced from one inductor induces an electrical potential across the other. The stationary inductor is embedded in a dielectric material that is etched out over the stationary inductor to provide the cavity over which the vibrating inductor is suspended.

Inductor-based MEMS microphone

Method of forming a dual damascene metal trace with reduced RF impedance resulting from the skin effect

The integration period of an imaging cell, or the time that an imaging cell is exposed to light energy, is substantially increased by utilizing a single-poly, electrically-programmable, read-only-memory (EPROM) structure to capture the light energy. Photogenerated electrons are formed in the channel region of the EPROM structure from the light energy. The photogenerated electrons are then accelerated into having ionizing collisions which, in turn, leads to electrons being injected onto the floating gate of the EPROM structure at a rate that is proportionate to the number of photons captured by the channel region.

Growing community of inventors

Santa Clara, CA, United States of America

Robert Drury