Asml Netherlands B.v.

Robert Douglas Watso

Martinus Hendrikus Antonius Leenders

Hans Jansen

Anthonius Martinus Cornelis Petrus De Jong

Jan Willem Cromwijk

Antonius Johannus Van Der Net

Teunis Cornelis Van Den Dool

Youri Johannes Laurentius Maria Van Dommelen

Jacques Cor Johan Van Der Donck

Peter Franciscus Wanten

Nadja Schuh

Jeroen Johannes Sophia Maria Mertens

Johannes Henricus Wilhelmus Jacobs

Gheorghe Tanasa

Jimmy Matheus Wilhelmus Van De Winkel

Peter Paul Steijaert

Maurice Martinus Johannes Van Der Lee

Joao Paulo Da Paz Sena

Henricus Martinus Dorotheus Van Lier

Antonius Martinus Cornelis Petrus De Jong

Thomas Laursen

A lithographic projection apparatus is disclosed which includes a cleaning station. Several embodiments of the cleaning station are disclosed. In an embodiment, measures are taken to avoid contact of a cleaning fluid with the final element of the projection system. In an embodiment, measures are taken to avoid foaming of the cleaning fluid. The use of a thermally isolated island is also disclosed as well as its optimal position.

Lithographic apparatus and a method of operating the apparatus

An immersion lithographic apparatus is cleaned by use of a cleaning liquid consisting essentially of ultra-pure water and (a) a mixture of hydrogen peroxide and ozone, or (b) hydrogen peroxide at a concentration of up to 5%, or (c) ozone at a concentration of up to 50 ppm, or (d) oxygen at concentration of up to 10 ppm, or (e) any combination selected from (a)-(d).

Lithographic apparatus and contamination removal or prevention method

A lithographic apparatus that includes a reflector configured to reflect a cleaning beam of radiation projected through a projection system onto an underside of a liquid retrieval system. The construction of the reflector is also described as is a method for irradiating the underside of a liquid supply system for use in cleaning.

Lithographic apparatus, reflective member and a method of irradiating the underside of a liquid supply system

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Delevan, NY, United States of America

Robert Douglas Watso