Temptronic Corporation

Robert D Kelso

Shawn M Cousineau

Robert R Lopez

Douglas S Olsen

David A Stura

A system and method for controlling temperature in a workpiece chuck are described. A fluid circulation system circulates a temperature control fluid, such as an engineered HFE fluid, through te workpiece chuck. A fluid recovery system coupled to the fluid circulation system recovers a portion of the temperature control fluid from the fluid circulation system by circulating a gas through the fluid circulation system including fluid tubes and fluid passages in the chuck. The gas, which can be air, carries a portion of residual or excess fluid through the fluid circulation system as it is circulated. The residual fluid is carried back to a reservoir such that it can continue to be used to control temperature of the chuck. Where gas and temperature control fluid vapors are displaced from the reservoir, they are routed through a suction line heat exchanger which condenses the vapor. The gas and condensed fluid are separated in a fluid separator. The separated fluid is returned to the reservoir, and the separated air can be vented to the atmosphere.

Temperature-controlled chuck with recovery of circulating temperature control fluid

A heat exchanger such as an evaporator for a temperature control system includes an input port with an orifice through which a refrigerant enters the heat exchanger. The heat exchanger includes a plurality of plates and a tilted deflection surface near the input port. High-pressure refrigerant entering through the input port impinges on the tilted deflection surface and is deflected by the deflection surface onto the plates. The tilt angle of the deflection surface is selected such that the refrigerant is evenly distributed over the plates resulting in even and highly efficient heat transfer. The heat exchanger can be used as the evaporator in a refrigeration system used to control temperature in a workpiece chuck for supporting a flat workpiece such as a semiconductor wafer during processing and testing. In particular, the heat exchanger can be used to control the temperature of a fluid which is circulated through the chuck to control the temperature of the workpiece and/or the chuck itself. In that setting, the temperature control circulating fluid can be circulated through the heat exchanger over the sides of the plates opposite the refrigerant to cool the circulating fluid. Because the refrigerant is evenly distributed over the plates, highly efficient heat transfer, i.e., cooling, is achieved.

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Bridgewater, MA, United States of America

Robert D Kelso