Asml Holding N.v.

Asml Netherlands B.v.

Robert D Harned

Cheng-Qun Gui

Nora-Jean Harned

Noreen Harned

Pieter Willem Herman De Jager

Matthew Lipson

Geoffrey O'Connor

Patrick De Jager

Timothy O'Neil

Azat M Latypov

Stanislav Y Smirnov

Richard A Gontin

Lev Sakin

Irina I Pozhinskaya

A wafer chuck for use in a lithographic apparatus, which includes a low-thermal expansion glass ceramic substrate, a silicon silicon carbide layer, and a bonding layer comprising silicate having a strength of at least about 5 megapascals, the bonding layer attaching the silicon silicon carbide layer to the substrate is described. Also, a method of forming a wafer chuck for use in a lithographic apparatus, which includes coating a portion of one or both of a low-thermal expansion glass ceramic substrate and a silicon silicon carbide layer with a bonding solution, and contacting the substrate and the silicon silicon carbide layer to bond the substrate and the silicon silicon carbide layer together is described.

Bonding silicon silicon carbide to glass ceramics

An embodiment of the present invention provides a method for designing optical surfaces. According to this method, m optical surfaces are defined, such that each successive optical surface receives a wavefront from a previous optical surface. Wavefront aberrations caused by each optical surface are calculated. The changes at each respective optical surface required to compensate for the wavefront aberration caused by the respective optical surfaces are then calculated. A desired optical profile for each of the m optical surfaces is determined in accordance with the calculated changes to each respective optical surface.

Method for improved optical design using deterministically defined surfaces

An exposure system for manufacturing flat panel displays (FPDs) includes a reticle stage adapted to support a reticle. A substrate stage is adapted to support a substrate. A reflective optical system is adapted to image the reticle onto the substrate. The reflective optical system includes a primary mirror including a first mirror and a second mirror, and a secondary mirror. The reflective optical system has sufficient degrees of freedom for both alignment and correction of third order aberrations when projecting an image of the reticle onto the substrate by reflections off the first mirror, the secondary mirror, and the second mirror.

Large field of view projection optical system with aberration correctability

The present invention is directed to a system and method for using a spatial light modulator (SLM) to perform a null test of an (aspheric) optical surface. In an embodiment, such a system includes an interferometer, an optical element, and an SLM. The interferometer provides electromagnetic radiation. The optical element conditions the electromagnetic radiation to provide a first beam of radiation and a second beam of radiation. The SLM shapes a wavefront of the first beam of radiation resulting in a shaped wavefront corresponding to an optical surface. The shaped wavefront is incident on and conditioned by the optical surface. The shape of the optical surface is analyzed based on a fringe pattern resulting from interference between the shaped wavefront mapped by the optical surface and the second beam of radiation. The system may also include an optical design module that converts a null corrector design corresponding to the optical surface into instructions for the SLM.

Diffractive null corrector employing a spatial light modulator

A projection system for a lithographic apparatus having a plurality of mirror imaging systems. In an embodiment, the mirror imaging systems are arranged in two rows with each row being perpendicular to a scanning direction of the projection system. Each mirror imaging systems has an associated imaging field. The mirror imaging systems are arranged in a manner that precludes gaps between adjacent imaging fields in the scanning direction. Each mirror imaging system includes a concave mirror and a convex mirror arranged concentrically with the concave mirror. The concave mirrors have a first mirror portion and a second mirror portion that are independently movable. In one embodiment, each of the mirror imaging systems has an associated phase, and the mirror imaging systems in one row are positioned 180 degrees out of phase with the mirror imaging systems in the other row.

Projection system for a lithographic apparatus

A method of combining output of a plurality of light sources includes arranging a plurality of light sources in the same plane and having their beams directed at a first mirror, rotating the first mirror in the plane so as to direct the beams towards the same direction, and pulsing the light sources in synchronization with the rotation of the first mirror. The light sources can include, for example, pulsed lasers or lamps. The method can further include directing the beams from the first mirror towards a second counter-rotating mirror, wherein rotation of the second counter-rotating mirror compensates for angular displacement of the beams due to rotation of the first mirror. The method can also include orienting the first mirror at about 45 degrees relative to an incident path of the beams. This method can be used, for example, to expose a substrate in a lithography system.

Multiple illumination source exposure apparatus

An exposure system for manufacturing flat panel displays (FPDs) includes a reticle stage and a substrate stage. A magnification reflective optical system images the reticle onto the substrate. The system may be a 2&#xd7; magnification system, or another magnification that is compatible with currently available mask sizes. By writing reticles with circuit pattern dimensions that are one-half the desired size for an FPD, a 2&#xd7; optical system can be used to expose FPDs. The designs for the 1.5&#xd7; and larger magnification optical systems all typically have at least three powered mirrors. A corrector, positioned either near the reticle or near the substrate, can be added to the three mirror design to improve the systems optical performance. The corrector may be a reflective, or a refractive design. The corrector can have an aspheric surface, and optionally a powered surface.

Large field of view 2X magnification projection optical system for FPD manufacture

A system for combining outputs of multiple light sources includes a plurality of light sources, and a rotatable fold mirror oriented at an angle so as to reflect beams from each of the light sources towards the same direction at various times during its rotation. A projection optical system directs the beams towards a substrate. The light sources can be pulsed lasers or lamps. The rotatable fold mirror can be mounted on an air bearing, a magnetic bearing, or a fluid bearing, and can be oriented at about 45 degrees relative to the vertical. An optional fold mirror for folding an optical axis of the system is between the rotatable fold mirror and the projection optical system. The fold mirror can counter-rotate in synchronization with the rotatable fold mirror so as to keep the direction of the beams constant. The rotatable fold mirror can be mounted on an air bearing, which in turn is mounted on an air bearing support. The air bearing and the air bearing support have a pass hole for passing the beams. Alternatively, the rotatable fold mirror can be mounted below an air bearing support.

A system for aligning of optical components includes an interferometer and a first diffractive alignment element. A housing is used for positioning a first optical element being aligned. A detector is used for detecting fringes produced by reflections off surfaces of the first optical element. A grating pattern on the first diffractive alignment element is designed to produce a retro-reflected wavefront or a wavefront transmitted or reflected in a predetermined direction when the first optical element is in alignment. The first diffractive alignment element includes a first region for alignment of the interferometer, a second region for alignment of one surface of the first optical element, and a third region for alignment of another surface of the first optical element. The first, second and third regions can be of any shape such as circular, rectangular, triangular, or the like.

Optical system alignment system and method with high accuracy and simple operation

A system and method use a pattern generator to pattern illumination that is projected using an adjustable projection system to form one or more devices on a substrate. The adjustable projection system includes at least one active mirror, which is adjusted to compensate for errors found on a surface of the pattern generator, the substrate, and or an optical element in the lithography system. In one example, the adjustable projection system includes two concave and one convex mirrors, while in another system the adjustable projection system also includes one or two fold mirrors. At least one of the mirrors in these two examples is an active mirror, which is used for the compensating. In this arrangement, local focus and/or magnification errors can be substantially reduced or eliminated.

Lithographic apparatus having an adjustable projection system and device manufacturing method

An exposure system for manufacturing flat panel displays (FPDs) includes a reticle stage adapted to support a reticle. A substrate stage is adapted to support a substrate. A reflective optical system is adapted adapted to image the reticle onto the substrate. The reflective optical system includes a primary mirror including a first mirror and a second mirror, and a secondary mirror. The reflective optical system has sufficient degrees of freedom for both alignment and correction of third order aberrations when projecting an image of the reticle onto the substrate by reflections off the first mirror, the secondary mirror, and the second mirror.

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Redding, CT, United States of America

Robert D Harned