Tokyo Electron Limited

Array Technologies, Inc.

Alliedsignal Inc.

Robert Clark Rowan, Jr

Robert F Foster

Gerrit J Leusink

Joseph T Hillman

Benjamin C De Fresart

Douglas A Webb

Michael S Ameen

Rene E LeBlanc

Stanislaw Kopacz

Jonathan Sokol

Frank Heydrich

William Dale Jones

Frederick T Turner

Thomas J Licata

Glyn J Reynolds

Edward L Sill

Michael James Lombardi

Lloyd L Clevenger

A driveline joint may include a driveline shaft that has a plurality of slots and a shaft coupling positioned in an interior of the driveline shaft in which the shaft coupling includes one or more openings with each of the openings corresponding to one or more respective slots of the plurality of slots included in the driveline shaft. The driveline joint may include one or more spherical bearings that are each positioned between an interior lateral surface of the driveline shaft and an exterior lateral surface of the shaft coupling and against one of the openings of the shaft coupling. The driveline joint may include one or more fasteners, wherein each of the fasteners extends through one of the slots and one of the openings of the shaft coupling.

Photovoltaic tracker driveline joint

One or more chambers of a multi-chamber vacuum processing apparatus are provided with a high gas flow conductance path to an exhaust volume of the apparatus that is maintained at high vacuum with a high vacuum pump. Separate pumps for the one or more chambers are made unnecessary by providing such chambers with a protective deposition shield or shield set that is configured to substantially protect walls of the chamber and the gas flow conductance path from deposition and to partially impede the gas flow from the chamber through the gas flow conductance path to the exhaust volume so that the chamber can be operated at a higher pressure than that of the exhaust volume and the chambers can be operated at different pressures and without cross-contamination. Preferably, a nested set of chamber shields is used. A controller is programmed to control the processing of wafers in the chambers by controlling the supply of process gas into the chambers.

Vacuum-processing chamber-shield and multi-chamber pumping method

A processing system for processing a substrate comprises a process chamber having a top, a bottom, and a sidewall for defining a process space therein. The process chamber has an opening in the sidewall thereof for providing access to the process space. A plasma-generating assembly is coupled with the process chamber for creating a plasma within the process space. A substrate support assembly is configured for coupling with the process chamber to support a substrate within the process space. The substrate support assembly extends into the process space through the sidewall opening in the process chamber and seals the sidewall opening to generally isolate the process space from atmosphere.

Process apparatus and method for improved plasma processing of a substrate

A method and apparatus for depositing a film by chemical vapor deposition comprises a showerhead for dispersing reactant gases into the processing space wherein the showerhead has a first space therein operable for receiving and dispersing the first reacting gas, and has a second space therein, generally isolated from the first space, and operable for receiving and dispersing the second reactant gas separate from the first gas dispersion for maintaining segregation of reactant gases and generally preventing premature mixture of the gases prior to their introduction into the processing space to prevent premature deposition in the system.

Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions

Apparatus and method for preventing the premature mixture of reactant

A turbine engine includes axially adjacent compressor and turbine rotors which define a groove therebetween. Into the groove between the rotors radially extends an annular interstage seal assembly. The seal assembly includes a thermally insulative cellular wall structure which resists thermal and pressure included distortions. At its radially inner extent the cellular wall defines a seal structure in cooperation with the rotors, and also carries heat shield members on an axial fore disposed toward the turbine rotor.

Turbine engine interstage seal

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Phoenix, AZ, United States of America

Robert Clark Rowan, Jr