Gca Corporation

Tropel Corporation

Robert C Moore

Analog-to-digital conversion and a computer produce finer resolution for interferometer distance measurement. The system applies to a laser interferometer producing two detected signals with voltages 19 and 20 that vary to form two sine waves in quadrature as interference fringes occur. A pair of analog-to-digital converters 21 and 22 converts each of these signals into digital values subdividing each sine wave fringe cycle into a plurality of increments. An up/down counter 25 supplied with a significant digit from each of the converters counts fringes corresponding to changes in path lengths. A computer 30 arranged with access to the fringe count and the digital increments determines a distance measurement based on the fringe count and a fine resolution of the distance measurement based on final values of the signals at any subdivided fringe cycle increments after changes in the path lengths.

Resolution system for interferometer

Phase is modulated in a grazing incidence interferometer by modulating the incidence angle and spacing the test surface far enough from the reference surface so that the incidence angle modulation changes the phase relationship between the interferring beam reflected from the test surface and the reference beam reflected from the reference surface substantially more than it changes the sensitivity of the interferometer to surface variations between the reference and test surfaces. The preferred way of accomplishing this is with tiltable mirror 15 modulating the incidence angle slightly relative to prism 11 with its reference surface 12 and test surface 13 spaced from reference surface 12 in interferometer 10. An electromagnetic element 16 such as a galvanometer is preferred for tilting mirror 15.

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Rochester, NY, United States of America

Robert C Moore