Trw Limited

Northrop Grumman Systems Corporation

Global Communication Semiconductors, LLC

Other

Northrop Grumman Space & Mission Systems Corporation

Northrop Gurmman Corporation

Robert Bruce Stokes

Alvin M Kong

Kuo-Hsiung Yen

Kei-Fung Lau

Reynold S Kagiwada

Shing-Kuo Wang

Liping Daniel Hou

Marshall Y Huang

Drew Cushman

Jay D Crawford

Alvin Ming-Wei Kong

Dae-Jin Hyun

Jeffrey H Elliott

Michael J Delaney

Barry Ross Allen

Gregory A Shreve

James C Lau

Michael D Lammert

Edward M Garber

Kun-Mao Pan

Rahil U Bhorania

David Penunuri

Joseph P Trieu

Kuo-Hsuing Yen

Jay D Cushman

Andy Chien-Hsiang Chen

Ronald D Kasparek

Steven E Housholder

An apparatus includes a first filter and a second filter. The first filter generally comprises a first plurality of resonators. The second filter generally comprises a second plurality of resonators. The first plurality of resonators generally comprise piezoelectric material. The second plurality of resonators generally comprise piezoelectric material. At least two of the first plurality of resonators are arranged in series between a signal input of the first filter and a signal output of the first filter. At least two of the second plurality of resonators are arranged in series between a signal input of the second filter and a signal output of the second filter. The second plurality of resonators are reverse connected relative to the first plurality of resonators. The first filter is generally connected in parallel with the second filter such that (a) the signal input of the first filter is connected to the signal input of the second filter, (b) the signal output of the first filter is connected to the signal output of the second filter, and (c) second harmonic emissions of the first filter are substantially canceled by second harmonic emissions of the second filter. The apparatus generally comprises a bulk acoustic wave (BAW) filter.

Bulk acoustic wave filter with reduced second harmonics generation

A bulk acoustic wave (BAW) resonator includes a substrate, a stack over the substrate and including a piezoelectric layer disposed between two electrode layers, and one or more edge frames. The one or more edge frames can be a raised metal frame extending parallel to a periphery of an active region of the stack and has one or more slanted cuts such that the edge frame does not form a closed loop and loss of acoustic energy in the active region through the one or more cuts is reduced, minimized or prevented. Alternatively or additionally, the one or more edge frames include a recessed edge frame in the form of a trench in the piezoelectric layer extending parallel to a boundary of the active region, and may further include a second edge frame formed on the first electrode and embedded in the piezoelectric layer.

Bulk acoustic resonator structures with improved edge frames

Devices and processes for preparing devices are described for reducing resonance of spurious waves in a bulk acoustic resonator and/or for obstructing propagation of lateral waves out of an active region of the bulk acoustic resonator. A first electrode is coupled to a first side of a piezoelectric layer and a second electrode is coupled to a second side of the piezoelectric layer to form a stack having the active region. The piezoelectric layer in the active region is configured to resonate in response to an electrical signal applied between the first electrode and the second electrode. One or more perforations in the first electrode, the piezoelectric layer and/or the second electrode, and/or one or more posts or beams supporting the stack, reduce resonance of spurious waves and obstruct propagation of lateral acoustic waves out of the active region.

Film bulk acoustic resonator with spurious resonance suppression

Devices and processes for preparing devices are described for reducing resonance of spurious waves in a bulk acoustic resonator. A first electrode is coupled to a first side of a piezoelectric layer and a second electrode is coupled to a second side of the piezoelectric layer. The piezoelectric layer is configured to resonate in response to an electrical signal applied between the first electrode and the second electrode. Perforations in the first electrode, the piezoelectric layer and/or the second electrode, and/or posts or beams supporting the second electrode, reduce resonance of spurious waves.

An RF switch useable up to millimeter wave frequencies and higher frequencies of 30 GHz and above. Four embodiments of the invention are configured as ground switches. Two of the ground switch embodiments are configured with a planar air bridge. Both of these embodiments are configured so that the bridge length is shortened between the transmission line and ground by introducing grounded stops. The other two ground switch embodiments include an elevated metal seesaw. In these embodiments, a shortened path to ground is provided with relatively low inductance by proper sizing and positioning of the seesaw structure. Lastly, broadband power switch embodiment is configured to utilize only a small portion of the air bridge to carry the signal. The relatively short path length results in a relatively low inductance and resistance lowers the RF power loss of the switch, thereby increasing the RF power handling capability of the switch.

MEMS millimeter wave switches

An apparatus in one example comprises a piezoelectric layer, a first electrode along a first side of the piezoelectric layer, and a second electrode along a second side of the piezoelectric layer. The first and second electrodes are adapted to receive a voltage bias to create an electric field in the piezoelectric layer that controls an acoustic velocity of a surface acoustic wave.

Electric field control of surface acoustic wave velocity

An apparatus in one example comprises a piezoelectric layer, an input transducer, an output transducer, and at least one electrode set. The input transducer is configured to convert an input signal from an input source to a surface acoustic wave and send the surface acoustic wave from an input portion of the piezoelectric layer to an output portion of the piezoelectric layer. The input transducer comprises a set of input passbands. The output transducer is configured to receive the surface acoustic wave from the output portion of the piezoelectric layer. The output transducer comprises a set of output passbands. The at least one electrode set is configured to apply at least one voltage bias to at least one portion of the piezoelectric layer to create an electric field that controls an acoustic velocity of the surface acoustic wave through the at least one portion of the piezoelectric layer. The at least one electrode set is configured to control one or more of the set of input passbands and the set of output passbands by adjustment of the at least one voltage bias.

Surface acoustic wave passband control

A variable passive component is provided for fabrication on a microelectromechanical system (MEMS) device. A conductive portion is provided on a low-profile sliding dielectric sheet that cooperates with a conductive portion disposed on a substrate to provide a variable passive component. The passive component can be a variable inductor provided by moving a shorted spiral inductor formed on the dielectric sheet over a spiral inductor on the substrate with varying degrees of overlap causing varying inductance values. The passive component can be a variable capacitor that consists of a large conductive pad on a dielectric plate which slides over two adjacent pads on the substrate with varying overlap causing varying capacitance values.

MEMS variable inductor and capacitor

A voice-activated microphone and transceiver system includes an interrogator unit for transmitting a signal, receiving a modulated signal, and demodulating the modulated signal such that the difference between the transmitted signal and the modulated signal correspond to a unique sound wave signal. An acoustically driven microphone unit is also included for receiving the signal from the interrogator unit, modulating the signal with the sound wave signal, wherein the sound wave signal contains instructions for controlling an electronic device, and transmitting the modulated signal back to the interrogator unit for analysis by a signal processor.

Passive voice-activated microphone and transceiver system

An adjustable surface acoustic wave (SAW) transducer is fabricated on a piezoelectric substrate. The adjustable SAW transducer includes a plurality of SAW interdigital transducer (IDT) fingers disposed on the substrate. Miniature switches are used to provide a plurality of interconnection patterns between the SAW IDT fingers such that a plurality of SAW characteristics can be generated from a single set of SAW IDT fingers.

Adjustable saw device

An RF switch and a process for fabricating an RF switch which includes multiple throws and can be fabricated utilizing only a single layer of metallization. The switch in accordance with the present invention includes an airbridge suspended beam disposed adjacent to one or more metal traces. One or more control pads are disposed adjacent to the airbridged suspended beam to operate the switch electrostatically. The suspended beam as well as the metal traces and contact pads are all fabricated with a single metallization layer. The switch is configured such that deflection of the beam is in a plane generally parallel to the plane of the substrate. By eliminating multiple metallization layers, the complexity for fabricating the switch is greatly reduced. Moreover, the switch configuration also allows multiple throws and multiple poles using a single level of metallization.

Planar airbridge RF terminal MEMS switch

Apparatus and method to determine the intensity of a residual magnetic field that accumulates on the rotor of a dynamoelectric machine to identify stator and rotor anomalies. A dynamoelectric machine, such as an induction motor, has a rotor which becomes magnetized with use. This magnetism tends to skew inductance tests which are used to predict problems developing within the motor. The apparatus and method measure the accumulated magnetic field of a motor rotor, and adjust conventional inductance tests to yield more accurate results.

Apparatus and method for detection of residual magnetic fields in

A low frequency mechanical resonator that resonates at relatively low frequencies and can be fabricated as part of an integrated circuit. The resonator includes a piezoelectric structure having a top piezoelectric layer and a bottom piezoelectric layer positioned over a recessed area in a substrate. A top input electrode is positioned on the top surface of the top piezoelectric layer, a middle shield electrode is positioned between the piezoelectric layers, and a bottom output electrode is positioned on the bottom surface of the bottom piezoelectric layer adjacent the recessed area. By applying an appropriate alternating current to the top electrode, the top piezoelectric layer is alternately contracted and expanded. Because the top piezoelectric layer is secured to the bottom piezoelectric layer, the piezoelectric structure will flex up and down in order to relieve stress within the structure. The flexing of the piezoelectric structure causes flexural waves within the piezoelectric structure which resonate at a particular frequency depending on the membrane material, membrane thickness, and the width of the recessed area. The top and bottom electrodes can be replaced with interdigital transducers in order to select particular higher order flexural resonances for higher resonant frequencies.

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Rancho Palos Verdes, CA, United States of America

Robert Bruce Stokes