University of Central Florida Research Foundation, Inc.

Tia Systems, Inc.

Robert Bernath

Martin C Richardson

Richard A Stoltz

Jeff A Bullington

Nathan Bodnar

Jessica Pena

Haley Kerrigan

Danielle Reyes

Joshua Duncan

Daniel Thul

Kazutoshi Takenoshita

Timothy McComb

Patrick Roumayah

Justin Cook

Soumya Sarang

Jose A Cunado

Michael Hemmer

Etienne Puyoo

Christopher Brown

A laser system may include one or more seed lasers to generate a pulsed seed beam. The system may further include a pulse pattern generator to generate an intermediate patterned burst-mode beam from at least one laser pulse from the pulsed seed beam, where the intermediate patterned burst-mode beam includes one or more pulse bursts, and where each of the one or more pulse bursts includes a series of laser pulses with a selected pattern of inter-pulse spacings. The system may further include two or more power amplifiers to amplify the intermediate patterned burst-mode beam to form an amplified patterned burst-mode beam, where at least two of the power amplifiers amplify different portions of the intermediate patterned burst-mode beam, and where the amplified patterned burst-mode beam includes a series of amplified pulse bursts including amplified laser pulses with the selected pattern of inter-pulse spacings.

Tailored laser pulse trains for burst-mode illumination

A laser system may include one or more seed lasers to generate a pulsed seed beam including one or more laser pulses, a pulse pattern generator to generate an intermediate patterned burst-mode beam from at least one laser pulse from the pulsed seed beam, where the pulse pattern generator includes splits the at least one laser pulse from the pulsed seed beam along two or more delay paths and combines light along the two or more delay paths to a common optical path, and where the intermediate patterned burst-mode beam includes laser pulses with a selected pattern of inter-pulse spacings associated with the two or more delay paths. The laser system may further include power amplifiers to amplify the intermediate patterned burst-mode beam to form an amplified patterned burst-mode beam, where the amplified patterned burst-mode beam includes amplified laser pulses with the selected pattern of inter-pulse spacings.

A supercontinuum source may include a seed source providing seed light, where the seed source includes one or more seed lasers to generate the seed light and a seed controller to adjust at least one of a temporal pulse profile or a wavelength of the seed light. The supercontinuum source may further include an optical fiber to receive the seed light, where the seed source pumps the optical fiber to induce the generation of supercontinuum output light, and where a spectrum of the supercontinuum output light is controllable by adjusting at least one of the temporal pulse profile or the wavelength of the seed light with the seed controller.

Spectral control of supercontinuum light

This is a way interrogating an object using retro-reflection of non-visible light. It uses e.g. IR transmitted toward the object from a distance and covertly detects the retro-reflection. Highly reflective passive non-visible light retroreflectors on the object reflects and refracts light back toward the light transmitter, with the returned light being very nearly parallel to the light from a narrow beam light transmitter.

Using of enhanced retroreflectors for non-visible light

This describes an enhanced retro-reflector that is designed to be a retro-reflector of non-visible light, but not visible, and can be designed to resemble common dust or dirt in the visible spectra. As the beads retro-reflect very little visible light they are not easily seen in visible light; thus they are difficult to counterfeit.

Method of coating a retroreflector to avoid reflecting visible light

Methods, systems, apparatus, devices for tracking, controlling and providing feedback on droplets used in EUV source technology. The method and system track and correct positions of droplet targets and generated plasma including generating the droplet target or plasma, optically imaging the generated target, determining position coordinates, comparing the position coordinates to a set optimal position to determine if a deviation has occurred and moving the generated target back to the optimal position if the deviation has occurred. The optical imaging step includes activating a light source to image the generated target, the light source is strobed at approximately the same rate as the droplet production to provide illumination of the droplet for stroboscopic imaging. The step of moving is accomplished mechanically by moving the generated target back to the predefined position or electronically under computer control.

Advanced droplet and plasma targeting system

Systems and methods for measuring a pulse length (&#x3c4;) of an ultra-short light pulse (P) based on processing a number of substantially similar light pulses. The system includes an autocorrelation optical system adapted to receive the light pulses Pand create from each light pulse two beams having an associated optical path length difference &#x394;OPL. Providing a different &#x394;OPL for each light pulse creates an autocorrelation interference pattern representative of an autocorrelation of the light pulse P. An LED detector detects the autocorrelation interference pattern and generates therefrom an autocorrelation signal. A signal-processing unit forms from the autocorrelation signal a digital count signal representative of a number of counted peaks in the autocorrelation signal above the full-width half maximum. Control electronics unit causes the varying &#x394;OPL and provides a difference signal (S) representative of the &#x394;OPL to the signal-processing unit. The signal processing unit is adapted to calculate the pulse length based on &#x394;OPL and the number Nof counted peaks. The autocorrelation optical system can either be prism-based or electro-optical-interferometer based. The measurement system can be made very compact and is far less expensive and far easier to use as compared to prior art ultra-short pulse measurement systems.

Growing community of inventors

Orlando, FL, United States of America

Robert Bernath