Applied Materials, Inc.

Kateeva, Inc.

Other

Sokudo Co., Ltd.

Applied Material, Inc.

Robert B Lowrance

Jeffrey C Hudgens

Michael Robert Rice

Eric Andrew Englhardt

Martin R Elliott

Eliyahu Vronsky

Charles T Carlson

William Tyler Weaver

Alexander Sou-Kang Ko

Conor Francis Madigan

Vinay K Shah

Kirk Van Katwyk

Tetsuya Ishikawa

Harald Herchen

Jay D Pinson, Ii

Leon Volfovski

David H Quach

Chongyang Wang

Rick J Roberts

Mohsen Salek

Helen R Armer

John A Backer

Michael A Miller

Manoocher Birang

Justin Mauck

Dean C Hruzek

Howard E Grunes

Shandon Alderson

Michael C Kuchar

Sass Somekh

Karl Mathia

Van Hoskins

Aleksey Khrustalev

Boris Fishkin

Brian C Lue

Mike Rice

Avi Tepman

Dave Silvetti

Dan Maydan

Sasson Roger Somekh

David K Cheng

Lance S Reinke

Richard A Seilheimer

J Christopher Moran

Charles Ryan-Harris

Edward M Abolnikov

Richard M Catlin, Jr

Gregory W Ridgeway

Brian Lu

Seiji Sato

Mehran Behdjat

Digby Pun

Mario David Silvetti

John S Hearne

David Craig Darrow

Efrain Quiles

Amit Puri

Brent Vopat

Zheng Xu

John C Forster

Peijun Ding

Ralf Hofmann

Sushant Suresh Koshti

Aihua Chen

Amitabh Puri

Goichi Yoshidome

Michael Rosenstein

Donny Young

Stephen Mark Smith

Christopher Buchner

Daniel Clarence Lubben

Ilyoung R Hong

William H McClintock

Christopher E Todd

Fernand Dorleans

Martin R Elliot

Sreekrishnan Sankaranarayan

Loy Randall Stuart

The present teachings disclose various embodiments of a printing system for printing substrate, in which the printing system can be housed in a gas enclosure, where the environment within the enclosure can be maintained as a controlled printing environment. A controlled environment of the present teachings can include control of the type of gas environment within the gas enclosure, the size and level particulate matter within the enclosure, control of the temperature within the enclosure and control of lighting. Various embodiments of a printing system of the present teachings can include a Y-axis motion system and a Z-axis moving plate that are configured to substantially decrease excess thermal load within the enclosure by, for example, eliminating or substantially minimizing the use of conventional electric motors.

Printing system assemblies and methods

The present teachings disclose various embodiments of a printing system for printing a substrate, in which the printing system can be housed in a gas enclosure, where the environment within the enclosure can be maintained as a controlled printing environment. A controlled environment of the present teachings can include control of the type of gas environment within the gas enclosure, the size and level particulate matter within the enclosure, control of the temperature within the enclosure and control of lighting. Various embodiments of a printing system of the present teachings can include a Y-axis motion system and a Z-axis moving plate that are configured to substantially decrease excess thermal load within the enclosure by, for example, eliminating or substantially minimizing the use of conventional electric motors.

In one aspect, a valve assembly adapted to seal an opening in a chamber is disclosed. Valve assembly includes a housing being adapted for coupling to a chamber surface having the opening therein, the housing including a threshold portion positioned adjacent to the chamber opening, the threshold portion having one or more inlets adapted to supply gas to an interior region of the housing adjacent to the chamber opening; and a sealing surface adapted to selectively (1) seal the opening, and (2) retract from the opening so as not to obstruct substrate passage. Numerous other system aspects are provided, as are methods and computer program products in accordance with these and other aspects.

Substrate processing system, valve assembly, and processing method

For various embodiments of a printhead assembly or ink stick assembly of the present teachings, each an ink stick assembly can be a self-contained assembly, of which a plurality of self-contained ink stick assemblies can be readily interchanged into a printing system during a printing process. Various embodiments of a self-contained ink stick assembly can have a fluidic system that can include a local ink reservoir, which can be in fluid communication with a bulk ink reservoir. Filling of a bulk ink reservoir can be done in a manual or automated mode. According to the present teachings, a bulk ink reservoir can have a volume sufficient to provide a continuous supply of ink to a local ink reservoir over the course of a printing process.

Printing system assemblies and techniques

A printer deposits material onto a substrate as part of a manufacturing process for an electronic product. At least one mechanical component experiences mechanical error, which is mitigated using transducers that equalize position of a transported thing, e.g., to provide an 'ideal' conveyance path; a substrate conveyance system and/or a printhead conveyance system can each use transducers in this manner to improve precise droplet placement. In one embodiment, errors are measured in advance, with corrections being 'played back' during production runs to mitigate repeatable transport path error. In a still more detailed embodiment, the transducers can be predicated on voice coils, which cooperate with a floatation table and floating, mechanical pivot assembly to provide frictionless, but mechanically-supported error correction.

Transport path correction techniques and related systems, methods and devices

Gas bearing systems, print gap control systems, and methods of print gap control are provided. The gas bearing systems can accommodate one or more print module packages. The systems and methods can be used for inkjet and/or thermal printing applications such as manufacturing organic light emitting devices (OLEDs). Gas bearing systems can employ one or more of pressurized gas and vacuum. For oxygen-sensitive applications, an inert gas, such as nitrogen gas, can be employed as the pressurized gas. Fluid channels and apertures of the gas bearing systems can be varied in terms of size and relative position to one another. Fluid channels and apertures can be grouped and paired with one or more manifolds and ultimately a pressurized gas and/or vacuum source.

Apparatus and method for control of print gap

Film-forming apparatuses, systems, and methods are provided. The apparatus can include a substrate positioning system and a printing array that includes an inkjet printing array and/or a thermal printing array. The positioning system can be a gas-bearing plate system. The positioning system can be configured to move a substrate between a first position, away from the printing array, and a second position, above the printing array. The apparatuses, systems, and methods can be used to manufacture organic light emitting devices (OLEDs), for example, flat panel displays.

Face-down printing apparatus and method

The present teachings disclose various embodiments of a printing system for printing a substrate, in which the printing system can be housed in a gas enclosure, where the environment within the enclosure can be maintained as a controlled printing environment. A controlled environment of the present teachings can include control of the type of gas environment within the gas enclosure, the size and level particulate matter within the enclosure, control of the temperature within the enclosure and control of lighting. Various embodiments of a printing system of the present teachings can include a Y-axis motion system and a Z-axis moving plate that are configured to substantially decrease excess thermal load within the enclosure by, for example, eliminating or substantially minimizing the use of conventional electric motors. Additionally, various embodiments of a Y-axis motion system of the present teachings can include a gripper motion control assembly of a Y-axis motion system configured to provide dynamic orientation of the rotation of a substrate about the theta-Z (&#x3b8;-Z) axis during Y-axis travel to maintain a high degree of precision for substrate orientation parallel to the axis of travel.

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Los Gatos, CA, United States of America

Robert B Lowrance