Berkin B.v.

Stichting Voor De Technische Wetenschappen

Universiteit Twente

Robert Anton Brookhuis

Remco John Wiegerink

Joost Conrad Lötters

Dannis Michel Brouwer

Maarten Sytze Groen

Theodorus Simon Josef Lammerink

Jarno Groenesteijn

Esken Meutstege

Joost Conrad LÖTTERS

The invention relates to a fluid flow device (), comprising a system chip () having a substrate (), a flow channel () defined within said substrate, and a sensor unit () connected to said flow channel for determining a property of a fluid in said flow channel. Furthermore, a valve unit () is provided within said substrate, for regulating fluid flow through said flow channel. The valve unit comprises a valve chamber () defined within said substrate, and a valve member () that is movably arranged within the valve chamber. The flow channel has a connection channel part () defined within said substrate (), wherein said connection channel part is connected to said valve unit. Further, control means connected to said valve unit and said sensor unit are provided. The control means are arranged for controlling said valve unit based on signals obtained by said sensor unit.

Fluid flow device, comprising a valve unit, as well as method of manufacturing the same

The invention relates to a fluid flow regulator device, comprising a valve member and a valve seat arranged to be movable with respect to each other such that a fluid flow surface area defined by the valve member and the valve seat can be changed. Furthermore, sensor means are provided for measuring a capacitance related to at least a measure of the fluid flow surface area. According to the invention, the sensor means are arranged such that the capacitance measured is inversely proportional to the distance between the valve member and the valve seat. In an embodiment, a reference capacitance relating to fluid flow conditions is measured.

Fluid flow regulator device, comprising a valve member and a valve seat defining a fluid flow surface area, as well as method of using the same

A sensing device for measuring force and/or torque includes a top part with a top electrode structure, a bottom part with a bottom electrode structure, and a support structure. The support structure includes spring elements for supporting the top part on the bottom part with the top electrode structure parallel to and facing the bottom electrode structure. The spring elements provide a gap between the top and bottom electrode structures and allow displacement of the top part relative to the bottom part in three orthogonal directions two parallel and one perpendicular to the bottom plate, and for rotation of the top part relative to the bottom part around three orthogonal axes, corresponding with the two parallel and one perpendicular directions. The displacement and/or rotation induce a change in distance between and/or overlap area of the top and bottom electrodes and a corresponding change of capacitance.

Six-axis force-torque sensor

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Ruurlo, Netherlands

Robert Anton Brookhuis