Illinois Tool Works Inc.

Llinois Tool Works Inc.

Robert Allen Willis

Bradley Scott Withers

Erik Scott Nelson

Michael G Croker

A cleaning device for cleaning a substrate is provided. In one aspect, the cleaning device includes a brush engaged with a mandrel, and the brush forms an Archimedean screw thread form. The brush is formed of an absorbent material, preferably foam. In one aspect, the brush is seated within a groove in the mandrel.

Archimedes brush for semiconductor cleaning

A cleaning device for cleaning substrates is provided. The cleaning device includes a generally cylindrically-shaped brush mandrel and a cylindrical brush. The brush mandrel has a body section with an outer surface positioned about a central axis. The outer surface is interrupted by an engagement member having primary features adjacent secondary features. The brush has a hollow bore formed around the brush mandrel with an inner surface interrupted by a second engagement member which mates the first engagement member. The primary features flow in a direction generally perpendicular to a rotational direction of the brush mandrel around the central axis and include a first surface which is generally perpendicular to the outer surface. The secondary features include a second surface which flows in a direction generally perpendicular to the first surface and along the central axis. No primary feature includes a radially obstructing feature formed over any secondary feature.

Brush mandrel for PVA sponge brush

A cleaning device for cleaning substrates is provided. The device comprises a cleaning brush having an outer cleaning surface surrounding a hollow bore and positioned around a first central axis al defining a first rotational direction &#x3b1;; and a plurality of cantilevered nodules formed on the outer cleaning surface, each nodule having a mounting portion connected with the outer cleaning surface, a cleaning portion connected with the mounting portion, and a contact member for engaging the substrate. The cleaning portion extends in a first direction Dfrom the mounting portion to the contact member, wherein a radial direction Dis defined as extending radially from the central axis atowards the outer cleaning surface and normal to the rotational direction &#x3b1;, and wherein the first direction Dintersects with the radial direction Dat an angle &#x3b3;. Angle &#x3b3; is greater than 0&#xb0; and less than 180&#xb0;.

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Diamond Springs, CA, United States of America

Robert Allen Willis