Sal, Inc.

Jmar Technologies, Inc.

Robert Allen Selzer

Franz Ludwig Rauch

Robert Harrison Macklin

Heinz Siegert

Yunsheng Ma

Klaus Simon

Charles S McLeod

William Rudolf Friml

Joe Baker Gagnon

A scanning boom microscope comprises an optical axis that can be varied into any axis or direction relative to a circular displacement about an optical boom that supports the scanning boom microscope's objective in free space. Accordingly, scanning boom microscope can be positioned to observe free standing samples away from the microscope base.

Systems and methods for a scanning boom microscope

The present invention is directed to the production of high quality semi-conductor devices created at speeds and in sizes that far exceed current x-ray lithography capabilities. The steps involved in the method include the use and development of horizontal beams from a synchrotron or point source of x-ray beams; preparation of submicrometer, transverse horizontal and vertical stepper stages and frames; providing a stepper base frame for the proper housing and mating of the x-ray beam; minimizing the effects of temperature and airflow control by means of a environmental chamber; transporting, handling and prealigning wafers and other similar items for tight process control; improving the control and sensing of positional accuracy through the use of differential variable reluctance transducers; controlling the continuous gap and all six degrees of freedom of the wafer being treated with a multiple variable stage control; incorporating alignment systems using unambiguous targets to provide data to align one level to the next level; beam transport, shaping or shaping devices, to include x-ray point sources; using an inline collimator or concentrator for collimating or concentrating the x-ray beams; and, imaging the mask pattern at the precise moment for optimum effectiveness.

Method of improving x-ray lithography in the sub 100nm range to create high quality semiconductor devices

Vertical stepper stage apparatus

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Waterbury, VT, United States of America

Robert Allen Selzer