Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Varian Semiconductor Equipment Associates, Inc. (1 from 916 patents)
1 patent:
1. 7675048 - Wafer holding robot end effecter vertical position determination in ion implanter system