Electro Scientific Industries, Inc.

Robert A Ferguson

Mark Kosmowski

Daragh Finn

Jeremy Alan Willey

Employing laser scanning directions () that are oblique to and against a predominant gas flow direction () equalize the quality and waviness characteristics of orthogonal scribe lines () made by the laser scans. Positioning and sequence of multiple scan passes to form a feature wider than the width of a scribe line () can be controlled to enhance quality and waviness characteristics of the edges of the feature.

Laser scan sequencing and direction with respect to gas flow

An apparatus, particularly a chuck for retaining a thin part for micro-machining processing, is disclosed. The chuck is formed of a plate-shaped body having a first surface and a second surface opposite the first surface. The plate-shaped body includes a light-transmissive material, and at least one of the first surface or the second surface is a roughened surface. The chuck can be incorporated into a micro-machining system using a chuck support that allows light through to backlight a processed part for inspection.

Controlled surface roughness in vacuum retention

A specimen inspection stage implemented with a processing stage coupling mechanism provides a capability to conduct with maximum efficiency post-processing specimen inspections on-board a processing platform. Heavy inspection equipment is mounted on a specimen inspection stage that is separate from a processing stage. In a preferred embodiment, the processing stage moves in response to an applied motive force and performs laser-based processing operations on a specimen. While laser processing is ongoing, the specimen inspection stage remains parked in its home position. When it is time for post-processing inspection, a stage coupling and decoupling mechanism couples together the specimen inspection stage and the processing stage, which transports the specimen inspection stage to and from the specimen position.

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Beaverton, OR, United States of America

Robert A Ferguson