The Boeing Company

Optometrix, Inc.

Other

Quantum Focus Instruments Corporation

Robert A Falk

Raymond W Huggins

Jeffrey A Krinsky

Methods and apparatus for producing sub-diffraction limited images utilizing an exponential scaling effect. An exemplary system provides an optical source that focuses an optical beam onto a target. The focused optical beam has sufficient optical intensity to induce an exponential signal response within the target. A detection device detects the exponential signal response. A scanning device scans the focused optical source and another device records the detection of the exponential signal response for purposes of producing a sub-diffraction limited image. The system further includes a display device that displays at least a portion of the recorded detection.

Laser thermal imaging

Systems and methods for identifying thermal response of a test structure. An example of the system includes a device that generates a excitation beam, a scanning device that scans the thermal excitation beam over a test structure, and a detector that detects acoustic waves produced scanning by the test structure. The system also includes a display device that generates and displays an image based on the detected acoustic waves. A second detector detects a reflection of the beam off of the test structure and the display device generates and displays an image based on the detected reflection.

Thermal-acoustic scanning systems and methods

Methods and systems that excite a test structure with an excitation beam and then sense the response of the test structure after some prescribed time interval with respect to the excitation. One or more detectors detect an emission from the test structure at a location of the test structure that is offset from a position on the test structure that is coincident with the excitation beam as the beam is scanned across the test structure.

Scanning systems and methods with time delay sensing

A system and method for indicating real time focus information for a scanning microscope. The system includes a detector, one or more bandpass filters, and one or more power indicators associated with the one or more bandpass filters. The detector detects an electrical signal from the scanning microscope. The bandpass filters filter the detected electrical signal. The bandpass filters are tuned to a desired range of frequencies. The power indicators detect and display average power of the electrical signal filtered by the corresponding bandpass filter. The system also includes a focusing device that generates a focusing signal based on the detected average power and focuses the scanning microscope based on the generated focusing signal. The focusing device automatically focuses the scanning microscope.

Focus aid for confocal microscope

A method and circuit for integrated circuit analysis. The apparatus includes an irradiation component configured to irradiate an integrated circuit, a constant voltage source, one or more current chokes placed between the constant voltage source and one or more connections to the integrated circuit, and one or more voltage amplifiers. The irradiation component introduces changes in the electrical state of the integrated circuit. The one or more voltage amplifiers produces a state signal relating to the changes introduced by the irradiation component in the integrated circuit. The current choke separates the function, a DC function, of supplying a voltage bias to the integrated circuit from the function, an AC function, of signal generation. This allows separate optimization of the two functions&mdash;the ability to correctly bias the integrated circuit and obtain high signal-to-noise ratios for the resulting signal. This optimization improves the sensing abilities of the circuit.

Externally induced voltage alterations for integrated circuit analysis

An optical beam (,) passes through an illuminator (,), a semiconductor device (,), and an imager (,) to form a test object image (,) on a camera (,). Intensity variations in the object image (,) correspond to carrier density and temperature gradients inside the semiconductor device (,).

Schlieren method for imaging semiconductor device properties

A radiant energy point source (10) generates radiant energy, and a mechanism (12, 15, 16) focuses the radiant energy generated by the point source onto a target (18) and scans the target with the focused radiant energy. A collector (16, 14) collects the focused radiant energy that is scattered from the target and a splitter (22) splits the collected radiant energy into two paths. Each of the two paths of the collected radiant energy is focused onto separate focal spots by a focusing mechanism (24). A pair of spatial filters (26, 28) filter the collected radiant energy at the focal spots. The spatial filters are offset from each other along the path of the focused radiant energy. Detectors (30, 32) separately detect the focused radiant energy which passes through each of the spatial filters and produce signals proportional to the quantity of detected focused radiant energy present. Finally, the produced signals are combined into an image signal related to the distance traveled by the radiant energy from the focusing mechanism to the target and back to the collector.

Method and apparatus for imaging semiconductor device properties

Integrated optic sensors for measuring electric, magnetic and temperature fields. Each sensor comprises an interferometer that includes first and second arms, each arm comprising an optical waveguide formed in a substrate. The interferometer includes a field sensitive material positioned adjacent the first arm for varying the optical path length of the first arm in accordance with the applied field. Electric, magnetic and temperature field sensors are provided that are based upon stress induced refractive index changes induced in the first arm. Electric and magnetic field sensors are disclosed based upon evanescent field coupling between the field sensitive material and the first arm. A dual ring resonator embodiment is also described.

Integrated optic field sensor consisting of an interferometer formed in

A multiplexed optical communication system comprising a source (12), a common optical bus (18, 20), a multiplexer (14) and a demultiplexer (16). The multiplexer comprises a plurality of modulators (50), each being formed in an electro-optic substrate and comprising a modulated arm (54) and a reference arm (56). Each arm comprises an optical waveguide, and the arms of each modulator have an optical path length difference LM(i) that is greater than the coherence length of the source, and that differs from the path length difference of each other modulator by an amount greater than the coherence length of the source. Each modulator also includes electrodes for varying the optical path length of its modulated arm based upon an electrical input signal representing an input data channel. The demultiplexer comprises a plurality of detectors, each having first and second detector arms, each detector arm comprising an optical waveguide. The detector arms have an optical path length difference LD(i) that differs from the optical path length difference of an associated modulator by an amount no greater than the coherence length of the source.

Multiplexed optical communication system

An optical receiver particularly suited for use in a noisy environment, the receiver includes an optical gain device for amplifying an input signal to produce an amplified input signal, a photodetector, and a mode selector. The optical gain device includes an optical gain medium, an optical input port through which the input signal may be received into the optical gain medium, and an optical output port through which an optical output signal may leave the optical gain medium. The output signal includes the amplified input signal, plus any noise generated within the optical gain device. The input and output ports include antireflection means. In a preferred embodiment, the mode selector comprises a single mode fiber-optic cable that transmits a single spatial mode of the output signal to the photodetector.

Optical receiver having optical gain medium and mode selector

An angular reflectance sensor having no moving parts and capable of the essentially simultaneous measurement of the reflectivity of a surface at a plurality of angles. The sensor comprises a quarter pitch graded index lens (78) having first end face (82) and second end face (84) and an optical axis (86). Light is coupled from an optical source (72) to an input position (88) on the first end face. A plurality of detectors are provided, each detector having associated therewith an output position (97-99) on the first end face. Each detector comprises a photodetector (74-76) and a fiber optic cable (94-96) for coupling light from the associated output position to the photodetector. The second end face of the lens is positioned adjacent a surface. Light reflected from the surface at a particular angle is focused by the lens to a particular output position, and thus to a particular photodetector.

Angular reflectance sensor

An arrangement for optical multiplexing and demultiplexing. The multiplexer comprises an optical output waveguide and a plurality of optical input waveguides coupled to the output waveguide by nonblocking optical switches. An electrical activation signal at a switch causes light entering the switch through the associated input waveguide to appear on the output waveguide. The activation signals are provided by a pulse traveling down an electrode past the optical switches, such that parallel input signals on the input waveguides are time multiplexed onto the output waveguide to produce a serial output signal. A similar arrangement is provided for a demultiplexer comprising one input waveguide and a plurality of output waveguides.

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Renton, WA, United States of America

Robert A Falk