Mitsubishi Denki Kabushiki Kaisha

Ritsuko Gotoda

Takaaki Murakami

Kaoru Motonami

Shigeru Shiratake

Yuichi Yokoyama

Yasuyoshi Itoh

Hiroshi Matsuo

Kenji Yasumura

Satoshi Hamamoto

Kenji Morisawa

There are provided a semiconductor device, which includes an element isolating oxide film having a good upper flatness, and a method of manufacturing the same. Assuming that t.sub.G represents a thickness of a gate electrode layer 6, a height t.sub.U to an upper surface of a thickest portion of element isolating oxide film 4 from an upper surface of a gate insulating film 5 and an acute angle .theta.i defined between the upper surfaces of element isolating oxide film 4 and gate insulating film are set within ranges expressed by the formula of {.theta.i, t.sub.U .linevert split.0.ltoreq..theta.i.ltoreq.56.6.degree., 0.ltoreq.t.sub.U .ltoreq.0.82t.sub.G }. Thereby, an unetched portion does not remain at an etching step for patterning the gate electrode layer to be formed later. This prevents short-circuit of the gate electrode. Since the element isolating oxide film has the improved flatness, a quantity of overetching in an active region can be reduced at a step of patterning the gate electrode. This prevents shaving of the gate insulating film and the underlying substrate surface.

Semiconductor device having an element isolating oxide film and method

A semiconductor device has an electric field intensity profile which can suppress generation of hot carriers near a drain region. Under the conditions maximizing a substrate current, a formula (1) of E2&lt;E1/2 is satisfied by a peak value (E1) in an electric field intensity profile in a channel length direction at a depth from the main surface of the semiconductor substrate allowing passage of carriers and an electric field intensity (E2) in the electric field intensity profile at an end of the gate electrode near the drain region. Generation of hot carriers near the drain can be suppressed more effectively than the case not satisfying the above conditions.

Semiconductor device minimizing hot carrier generation

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Hyogo, Japan

Ritsuko Gotoda