Ngk Insulators, Inc.

Rishun Kin

Hiroshi Takebayashi

Natsuki Hirata

Satoshi Sakashita

Shingo Sokawa

Norihisa Fujie

An electrostatic chuck heater is such that a sheet heater formed by embedding a heater wire in a resin sheet is disposed between an electrostatic chuck and a support pedestal. The heater wires are provided one for each of many zones of the resin sheet, and are composed of copper wires routed unicursally from their first ends to their second ends so as to extend throughout the zones.

Electrostatic chuck heater

A metal wiring bonding structurecomprises contactsof connection FPCand heater landsof a sheet heaterto be bonded by a solder bonding member. A connection FPCincludes contact opposed landsfamed of metal and disposed at positions respectively opposed to the plurality of contactson a surface of a support layeropposite from a surface on which metal wiresare provided, and through holespenetrating the contact opposed lands, the support layer, and contacts. Solder bonding memberscover surfaces of contact opposed landsand are filled inside through holesand in a bonding space C.

Metal wiring bonding structure and production method therefor

Object information representing a honeycomb structure with a plurality of meshes is obtained, and an inner-wall-surface heat transfer coefficient h, i.e., a heat transfer coefficient between an inner wall surface of a cell and a fluid, is derived as follows. First, one of the meshes as a target for derivation of the inner-wall-surface heat transfer coefficient his set (S), and a dimensionless coordinate X* is derived on the basis of position information (X-coordinate) of the set mesh and fluid state information (S). An inner-wall-surface dimensionless heat transfer coefficient Nucorresponding to the derived dimensionless coordinate X* is then derived on the basis of the inner-wall-surface dimensionless correspondence information (Sto S). The inner-wall-surface heat transfer coefficient hin the mesh set as the derivation target is then derived on the basis of the derived inner-wall-surface dimensionless heat transfer coefficient Nu(S).

Method for analyzing honeycomb structure, and program and analysis device for the same

Sheet heater for electrostatic chuck

Flexible printed circuits

A metal wiring bonding structurecomprises contactsof connection FPCand heater landsof a sheet heaterto be bonded by a solder bonding memberA connection FPCincludes contact opposed landsformed of metal and disposed at positions respectively opposed to the plurality of contactson a surface of a support layeropposite from a surface on which metal wiresare provided. In addition to base surfacesopposed to the contactsthe heater landsrespectively include extended surfacesopposed to imaginary extended portionsimaginarily extended ahead from the contactsA solder bonding membercovers surfaces of the contact opposed landsa distal end surface of the connection FPCand the extended surfacesof the heater landsand is filled in a bonding space C.

Growing community of inventors

Handa, Japan

Rishun Kin