Ball Semiconductor Corporation

Risaku Toda

Masayoshi Esashi

Murali Hanabe

An inclinometer comprising a spherical mass, a spherical shell having a reference axis and surrounding said spherical mass and a plurality of electrodes mounted on the spherical inner surface of said spherical shell, said inclinometer applied to detect the inclination angle of said reference axis by the output signal of said electrodes.

Inclinometer

A method and system for making a gas permeable shell in a micro electromechanical systems (MEMS) device is disclosed. The MEMS device is created with an internal sacrificial layer. The device is then coated with a slurry composition which, after drying, is later exposed to a solvent. As a result, the sacrificial layer is removed to produce interconnected voids.

Method to make gas permeable shell for MEMS devices with controlled porosity

A method and system for securing a small spherical shaped semiconductor substrate for processing operations, such as lithography, is disclosed. The substrate is secured by attaching it to a member and applying an adhering substance, such as photo resist, to the substrate and a portion of the member. The application may be by electroplating or other means. The electroplated substance securely attaches the substrate to the member so that one or more processing operations may be performed on the substrate. After processing, the substrate can be removed from the member.

Method to facilitate processing of three dimensional substrates

A method for making a micromachine, which includes a spherical body and a spherical shell surrounding said spherical body, comprising forming a victim layer on said spherical body to coat said spherical body, forming a function layer on said victim layer, said function layer including at least one conductive material pattern and/or insulating material layer, forming a structure layer of insulating material to coat said spherical body on which said function layer is formed, forming etching bores extending from the outer surface of said structure layer to said victim layer, and introducing gaseous etchant into said etching bores to remove said victim layer.

Method for making a micromachine

A method and system for making small gaps in a MEMS device is disclosed. The MEMS device is first made with a sacrificial layer where the gap is to reside. The device can then be assembled, including forming a protective coat surrounding the device. Once the protective coat is formed, small holes in the protective coat can be made to expose the sacrificial layer to an external environment. The holes can be formed using laser ablation. After the small holes have been made, an etchant can then be applied through the holes to remove the sacrificial layer.

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Plano, TX, United States of America

Risaku Toda