Hewlett-packard Development Company, L.P.

Qorvo Us, Inc.

Qorvo Biotechnologies, LLC

Zomedica Biotechnologies LLC

Hewlett-packard Company

Rio Rivas

Ed Friesen

Peter Mardilovich

Erik D Torniainen

James Richard Przybyla

Anthony M Fuller

Garrett E Clark

Kelly Ronk

Kevin McCarron

Siddhartha Bhowmik

Matthew Wasilik

Vincent K Gustafson

Lawrence H White

Silam J Choy

Gernot G Fattinger

Donald W Schulte

Terry E McMahon

Thayne L Edwards

John Belsick

Shen Buswell

Buu Quoc Diep

Eric Lee Nikkel

Jeremy Harlan Donaldson

Daniel A Kearl

Si-lam Choy

John B Rausch

Kellie Susanne Jensen

David Doerr

David Douglas Hall

Jeffrey R Pollard

Qingqiao Wei

Angela White Bakkom

Roberto A Pugliese

Todd A Cleland

Bradley D Chung

Mehrgan Khavari

Timothy R Emery

David Pidwerbecki

David C Kamp

Niranjan Thirukkovalur

Mark C Huth

Derya Deniz

Christopher Hans Bakker

Matthew Ryder

Deanna J Bergstrom

Rosanna L Bigford

Lawrence Thurber

Kevin Brown

Garrard Hume

Greg K Justice

Jon A Crabtree

Samson Berhane

Henry Kang

Robert K Messenger

Conrad Jenssen

Bruce Murdock

Paul Templin

Minalben Bhavin Shah

Gerald G Trunk

Jianhui Gu

Bang Nguyen

Mark H MacKenzle

Craig Andrus

Corey Deyo

Rocky H Knuth

Gerald R Wonnacott

Becky Clark

Rob Pugliese

Mahrgan Khavarl

Bernard A Rojas

Edward Friesen

Kevin Mccarron

A fluidic device includes at least one bulk acoustic wave (BAW) resonator structure with a functionalized active region, and at least one first (inlet) port defined through a cover structure arranged over a fluidic passage containing the active region. At least a portion of the at least one inlet port is registered with the active region, permitting fluid to be introduced in a direction orthogonal to a surface of the active region bearing functionalization material. Such arrangement promotes mixing proximate to a BAW resonator structure surface, thereby reducing analyte stratification, increasing analyte binding rate, and reducing measurement time.

Fluidic device with fluid port orthogonal to functionalized active region

Methods of fabricating a bulk acoustic wave resonator structure for a fluidic device. The methods can include a first step of disposing a first conductive material over a portion of a first surface of a substrate to form at least a portion of a first electrode, the substrate having a second surface opposite the first surface. Then, a piezoelectric material may be disposed over the first electrode. Next, a second conductive material can be disposed over the piezoelectric material to form at least a portion of a second electrode. The second conductive material extends substantially parallel to the first surface of the substrate and the second conductive material at least partially extends over the first conductive material. The overlapping region of the first conductive material, the piezoelectric material, and the second conductive material form a bulk acoustic wave resonator, the bulk acoustic wave resonator having a first side and an opposing second side. An acoustic energy management structure is then disposed over a first side of the bulk acoustic wave resonator. Next a third conductive material is disposed over a portion of the second conductive material that extends beyond the bulk acoustic wave resonator, wherein the third conductive material forms an interconnect extending above the acoustic energy management structure in a direction substantially perpendicular to the first surface of the substrate. Finally a portion of the second surface of the substrate is removed to expose a chemical mechanical connection at the first electrode at a second side of the bulk wave acoustic resonator. Devices formed thereby are also included.

Acoustic resonator device

A fluidic device and a method of preventing isolation material from bleed-out therein is described herein. The fluidic device includes a bulk acoustic wave resonator structure defining at least one surface area region on which a functionalization material is disposed and the resonator structure includes a repelling area. The fluidic device also includes isolation material disposed on the resonator structure and away from the at least one surface area region. The repelling area is configured to prevent the isolation material from extending into the at least one surface area region. Further, an electronic board may be operably attached to the resonator structure and the isolation material may be disposed in a gap therebetween to electrically isolate electrical contacts and form a fluidic channel.

Preventing epoxy bleed-out for biosensor devices

A micro-electrical-mechanical system (MEMS) resonator device includes at least one functionalization material arranged over at least a central portion, but less than an entirety, of a top side electrode. For an active region exhibiting greatest sensitivity at a center point and reduced sensitivity along its periphery, omitting functionalization material over at least one peripheral portion of a resonator active region prevents analyte binding in regions of lowest sensitivity. The at least one functionalization material extends a maximum length in a range of from about 20% to about 95% of an active area length and extends a maximum width in a range of from about 50% to 100% of an active area width. Methods for fabricating MEMS resonator devices are also provided.

Acoustic resonator device with controlled placement of functionalization material

Lateral boundaries of a fluidic passage of a fluidic device incorporating at least one BAW resonator structure are fabricated with photosensitive materials (e.g., photo definable epoxy, solder mask resist, or other photoresist), allowing for high aspect ratio, precisely dimensioned walls. Resistance to delamination and peeling between a wall structure and a base structure is enhanced by providing a wall structure that includes a thin footer portion having a width that exceeds a width of an upper wall portion extending upward from the footer portion, and/or by providing a wall structure arranged over at least one anchoring region of a base structure. Anchoring features may include recesses and/or protrusions.

BAW sensor device with peel-resistant wall structure

A fluidic device incorporating at least one BAW resonator structure (e.g., a biosensing device) and a fluidic passage includes one or more features that provide filtration capability. Certain embodiments include at least one group of pillars extending into the fluidic passage which are arranged between an active region of the at least one BAW resonator structure and at least one fluidic port. Individual pillars are separated from one another by inter-pillar spaces that provide redundant fluid flow paths while preventing passage of obstruction media such as particulate matter, cells, and/or bubbles. Certain embodiments provide porous material arranged in fluid communication with at least one fluidic port and configured to filter contents of fluid supplied thereto. Porous material (e.g., porous membranes) may be provided in a cover structure of a fluidic device or within a filtration cartridge.

Baw sensing and filtration device and related methods

In some examples, a printhead can include a main printer fluid line, a firing chamber in fluid communication with the main printer fluid line to receive printer fluid from the main printer fluid line, and a resistor positioned in the firing chamber. The resistor can, for example, receive an electronic current to cause the resistor to heat up and eject printer fluid droplets from the printhead. The printhead can further include a photolithographically fabricated check valve positioned in the firing chamber. The check valve can, for example, be openable to allow filling of the firing chamber with printer fluid and closeable to at least partially seal the main printer fluid line from printer fluid blowback caused by the resistor.

Printhead with printer fluid check valve

A bulk acoustic wave MEMS resonator device includes at least one functionalization (e.g., specific binding or non-specific binding) material arranged over a top side electrode, with at least one patterned enhanced surface area element arranged between a lower surface of the top side electrode and the functionalization material. The at least one patterned enhanced surface area element increases non-planarity of the at least one functionalization material, thereby providing a three-dimensional structure configured to increase sensor surface area and reduce analyte diffusion distance, and may also promote fluid mixing. Methods for biological and chemical sensing, and methods for forming MEMS resonator devices and fluidic devices are further disclosed.

BAW sensor with enhanced surface area active region

A fluidic device incorporating a substrate, at least one bulk acoustic wave (BAW) resonator structure, and a fluidic channel bound at least in part by the at least one BAW resonator structure. The fluidic device further includes at least one fluidic via defined through at least a portion of the substrate, thereby permitting fluidic connections and electrical connections to be provided on opposing upper and lower surfaces of the fluidic device. The at least one BAW resonator structure may include a piezoelectric material comprising a c-axis having an orientation distribution that is predominantly non-parallel to normal of a face of the substrate, and may be overlaid with a functionalization material (e.g., a specific binding material overlying a self-assembled monolayer) to enable detection of a target species in a sample supplied to the fluidic device.

Sensor device with BAW resonator and through-substrate fluidic vias

A fluidic device includes a base structure including at least one bulk acoustic wave (BAW) resonator structure having a fluidic passage containing at least one functionalized active region overlaid with functionalization material suitable to bind an analyte. One or more of a wall structure, a cover structure, or a portion of the base structure defining the fluidic passage includes additional functionalization material to form at least one absorber configured to bind at least one analyte. The dynamic measurement range of a BAW resonator structure is increased when the at least one absorber is placed upstream of the at least one functionalized active region.

BAW sensor fluidic device with increased dynamic measurement range

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Corvallis, OR, United States of America

Rio Rivas