Tdk Corporation

Rin Sato

Satoshi Sasaki

Kazushi Tachimoto

Yoshiki Ohta

Masayoshi Inoue

Yoshiaki Ohta

Katsuya Inaba

Yuzo Komatsu

Takahiro Kezuka

In a piezoelectric element, internal stress generated in an inactive portion at the time of sintering when a piezoelectric element is fabricated or stress applied from the outside to the inactive portion is absorbed by a recess of a lower surface of a first through hole conductor and a recess of an upper surface of a second through hole conductor. Accordingly, for example, deformation, rupture, or the like of the through hole conductor is prevented, and conduction failure or disconnection of an electrode layer or a through hole conductor is prevented. Further, in the inactive portion, since a protrusion of the piezoelectric layer enters the recess of the through hole conductor, a holding force of the piezoelectric layer with respect to the through hole conductor increases, and deformation of the through hole conductor is prevented or obstructed.

Piezoelectric element

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Tokyo, Japan

Rin Sato