Mitsubishi Materials Corporation

Rie Mori

Kenichi Hijikata

Atsushi Saito

The present invention relates to an oxide sputtering target. By using the oxide sputtering target for formation of a protective film for an optical recording medium, a film, which has high storage stability and breakage resistance due to flexibility, can be deposited. Also, it can be utilized for direct-current sputtering and forms a less amount of particles during sputtering. The oxide sputtering target is made of an oxide sintered body including: with respect to a total content amount of metal compositions, 0.15 at % or more of one or more of Al, Ga, and In as a total content amount; 7 at % or more of Sn; and the balance Zn and inevitable impurities, wherein a total content amount of Al, Ga, In, and Sn is 36 at % or less.

Oxide sputtering target and protective film for optical recording medium

Disclosed is a corrosion-resistant film for protecting the surfaces of Ag, which comprises an Ag--Mg alloy having an Mg content of from 1 to 10 atomic % and which is applied to an Ag substrate. Also disclosed is a corrosion-resistant composite structure composed of an Ag substrate and a protective film of an Ag--Mg alloy with an Mg content of from 1 to 10 atomic % formed on the surface of the Ag substrate. The corrosion-resistant film protects an Ag with a silver-white gloss from being blackened by sulfide components, etc. The adhesiveness between the film and the Ag substrate is good. The composite structure has a high reflectivity and is useful as a reflective film for photo-magnetic recording media, optical recording media, reflectors, illuminators, etc. The surface of the corrosion-resisting film is oxidized to form an MgO layer on the film, and the film exhibits a high protecting effect.

Corrosion-resistant film for protecting surfaces of Ag and

Silver is alloyed with magnesium, and the magnesium content of the silver-magnesium alloy ranges from 1 atom % to 10 atom % so that a protection film of magnesium oxide prevents the silver-magnesium alloy from sulfur and ozone without an intermetallic compound.

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Omiya, Japan

Rie Mori