Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Cymer, Inc. (1 from 532 patents)
2. Carl Zeiss Laser Optics Gmbh (1 from 21 patents)
1 patent:
1. 8723073 - Illumination apparatus and method for controlling energy of a laser source