International Business Machines Corporation

Richard W Procter

Hormazdyar M Dalal

Hazara Singh Rathore

Eric Gerhard Liniger

Du Binh Nguyen

Birendra N Agarwala

Brett H Engel

Chunyan E Tian

Diana Llera-Hurlburt

An edge seal around the periphery of an integrated circuit device which environmentally protects the copper circuitry from cracks that may form in the low-k interlevel dielectric during dicing. The edge seal essentially constitutes a dielectric wall between the copper circuitry and the low-k interlevel dielectric near the periphery of the integrated circuit device. The dielectric wall is of a different material than the low-k interlevel dielectric.

Edge seal for a semiconductor device

Method of making an edge seal for a semiconductor device

Growing community of inventors

Hopewell Junction, NY, United States of America

Richard W Procter