Varian Semiconductor Equipment Associates, Inc.

Schneider Automation Gmbh

Richard V Chisholm

Roger Bradford Fish

Steven M Anella

Scott C Holden

Daniel A Hall

Scott E Peitzsch

Michael Esposito

Robert A Poitras

Lothar Ullrich

William A White

Paul G Wolejko

A system and method for monitoring forces on a substrate lifting apparatus. The system includes a platen cartridge with a platen and a movable lifting portion. The movable lifting portion includes a plurality of lifting arms coupled to a plurality of lift pins. A plurality of force sensing elements are associated with respective ones of the plurality of lifting arms and the plurality of lift pins. A controller receives signals from the plurality of force sensing elements, correlates the signals to respective forces applied to said plurality of lift pins. The correlated forces may indicate to the controller that an error condition exists, such as a stuck wafer, a broken wafer, a mis-positioned wafer, or a mechanical malfunction.

Force sensing system for substrate lifting apparatus

A method and apparatus for assigning a permanent identifier to a client node initially having a default identifier and being operably connected to a network. A server determines a location of the client node and assigns the permanent identifier to the client node in response to the location of the client node on the network.

Method and apparatus for assigning a network node address

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Swampscott, MA, United States of America

Richard V Chisholm