Forschungszentrum Karlsruhe Gmbh

Kernforschungszentrum Karlsruhe Gmbh

Burkert Gmbh & Co. Kg

Richard Rapp

Helmut Kalb

Hans Biedermann

Dieter Seidel

Werner Schomburg

Heinz Dinglreiter

Klaus Kadel

Walter Stark

In a micro diaphragm pump which has a pump body consisting of two parts, one part including two valve chambers with a pump chamber disposed therebetween and in communication with the valve chambers by passages, a diaphragm extends across and closes the chambers and forms, in the areas of the valve chambers, valve membranes for inlet and outlet valves which are integrally formed, both on one side of the diaphragm, both pump body parts being sealingly connected to the diaphragm.

Micro diaphragm pump

In a method of manufacturing frame-mounted membranes, a first membrane layer is formed on a substrate and openings are formed in this membrane layer which are then covered by a second membrane layer, a frame structure is formed on the membrane layers around the openings and the membrane layers with the frame structure are separated from the substrate to provide the frame-mounted membranes.

Method of manufacturing a frame-mounted membrane

In a process for galvanically forming structured plate-like bodies, wherein a layer of a plastic material is structured at one side and structure bodies with plane front surfaces are formed thereon so as to rise from a contiguous electrically conductive base, the front surfaces of the structure bodies are provided with isolated spangles of electrically conductive material which are electrically insulated from each other and sized and spaced such that a line across a front surface intersects at least one of the spangles and the structure base--used as a cathode--and the structured bodies are then galvanically covered with a metal to form the structured plate on the layer of plastic material.

Process for galvanically forming structured plate-shaped bodies

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Stutensee, Germany

Richard Rapp