Air Products and Chemicals, Inc.

Richard R Bodette

Eugene Joseph Karwacki, Jr

Philip Bruce Henderson

Andrew David Johnson

Christopher Robert Cording

Herbert David Johnson

Mario Joseph Moniz

A process for cleaning a glass-coating reactor includes: (a) providing the reactor to be cleaned, wherein the reactor contains a glass substrate within a chamber and the chamber has an internal surface coated with at least one substance selected from the group consisting of SiNor SiO; (b) terminating a flow of a deposition gas to the reactor; (c) adding to the reactor at least one cleaning gas to react with the at least one substance to form at least one volatile product; and (d) removing from the reactor the at least one volatile product.

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Kingsport, TN, United States of America

Richard R Bodette