Fusion Systems Corporation

Axcelis Technologies, Inc.

Richard Pingree

Carlo Waldfried

Mohammad Kamarehi

Alan Frederick Becknell

Thomas James Buckley

Palanikumaran Sakthivel

David Ferris

Jianou Shi

Gerald Cox

Aseem Srivastava

A method of removing material from a substrate, and a plasma discharge device wherein a plasma is excited by microwave energy having an electric field which is azimuthally and axially uniform in relation to the plasma tube. The microwave cavity is divided longitudinally into sections by conducting partitions, each of which is separately fed with microwave energy, and the plasma tube extends through openings in the partitions.

Microwave plasma discharge device

An electrodeless lamp is started by coupling microwave power of a first frequency to a lamp cavity, while the discharge is maintained by coupling microwave power of a second frequency, wherein the first frequency is lower than the second frequency. A cooling fluid is impinged on the lamp bulb immediately before the application of the microwave power of the first frequency.

Electrodeless lamp starting/operation with sources at different

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Frederick, MD, United States of America

Richard Pingree