Active Control Experts, Inc.

Cymer, Inc.

Richard Perkins

Erik Saarmaa

Kenneth B Lazarus

Gerald F Caron

Mark Beauregard

Charles Van Hoy

Baruch Pletner

Leonard Lublin

A multi-input, multi-output vibration control system for a lithography system. The system provides an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The system includes a processor programmed with a multi-input, multi-output control technique such as a linear quadratic Gaussian, H-infinity or mu synthesis. The actuator may comprise one or more plates or elements of electroactive material bonded to an electroded sheet.

Multi-input, multi-output motion control for lithography system

An electrically driven signal unit is adapted for one-step assembly or injection molding with a device housing to vibrate, flex, beep or emit audio signals, or to sense and provide tactile feedback or control. The signal unit is a package with one or more active areas each containing a layer of ferroelectric or piezoelectric material, connected by inactive areas which may position, align and conduct electricity to the active areas. The active areas may be coupled over a region to transmit compressional, shear or flexural wave energy into the housing, or may contact at discrete regions while bending or displacing elsewhere to create inertial disturbances or impulses which are coupled to create a tactile vibration of the housing. The unit may be assembled such that the housing, the sheet or discrete areas thereof form a bender to provide tactile or sub-auditory signals to the user, or may be dimensioned, attached and actuated to produce audio vibration in the combined structure and constitute a speaker. In other embodiments one or more active regions of piezo material are attached to thin or movable wall regions of the unit to sense strain and, in conjunction with a conditioning circuit, produce electrical switching or control signals for the device. Other embodiments include devices having a tight tolerance between a housing wall and a signal module, and devices having one or more through-holes located on the housing wall. The invention also includes electroactive sheet structures having a polymer block, bracket or functional body formed therearound, which serves as a mounting, coupling or functional operating structure for the driven device.

Inertial/audio unit and construction

An electrically driven signal unit is adapted for one-step assembly or injection molding with a device housing to vibrate, flex, beep or emit audio signals, or to sense and provide tactile feedback or control. The signal unit is a package with one or more active areas each containing a layer of ferroelectric or piezoelectric material, connected by inactive areas which may position, align and conduct electricity to the active areas. The active areas may be coupled over a region to transmit compressional, shear or flexural wave energy into the housing, or may contact at discrete regions while bending or displacing elsewhere to create inertial disturbances or impulses which are coupled to create a tactile vibration of the housing. The unit may be assembled such that the housing, the sheet or discrete areas thereof form a bender to provide tactile or sub-auditory signals to the user, or may be dimensioned, attached and actuated to produce audio vibration in the combined structure and constitute a speaker. In other embodiments one or more active regions of piezo material are attached to thin or movable wall regions of the unit to sense strain and, in conjunction with a conditioning circuit, produce electrical switching or control signals for the device. The invention also includes electroactive sheet structures having a polymer block, bracket or functional body formed therearound, which serves as a mounting, coupling or functional operating structure for the driven device.

An electrically driven signal unit is adapted for one-step assembly or injection molding with a device housing to vibrate, flex, beep or emit audio signals, or to sense and provide tactile feedback or control. The signal unit is a package with one or more active areas each containing a layer of ferroelectric or piezoelectric material, connected by inactive areas which may position, align and conduct electricity to the active areas. The active areas may be coupled over a region to transmit compressional, shear or flxural wave energy into the housing, or may contact at discrete regions while bending or displacing elsewhere to create inertial disturbances or impulses which are coupled to create a tactile vibration of the housing. The unit may be assembled such that the housing, the sheet or discrete areas thereof form a bender to provide tactile or sub-auditory signals to the user, or may be dimensioned, attached and actuated to produce audio vibration in the combined structure and constitute a speaker. In other embodiments one or more active regions of piezo material are attached to thin or movable wall regions of the unit to sense strain and, in conjunction with a conditioning circuit, produce electrical switching or control signals for the device. The invention also includes electroactive sheet structures having a polymer block, bracket or functional body formed therearound, which serves as a mounting, coupling or functional operating structure for the driven device.

Growing community of inventors

Malden, MA, United States of America

Richard Perkins