Bell Telephone Laboratories

Richard M Jacobs

Adrian R Hartman

Ashok K Sinha

Peter W Shackle

Robert Leonard Pritchett

Frederick A D'Altroy

In a two-level overlapping polysilicon device even the slightest amount of undercutting of an oxide layer (12) which underlies a first polysilicon layer (14) can lead to unacceptably low breakdown voltages in the device. In accordance with the invention, the first polysilicon and oxide layers of an LSI MOS wafer are defined as usual. But then the standard fabrication process is modified to etch the first polysilicon layer back beyond the edge of the oxide undercut. Subsequently, the structure is reoxidized and a second polysilicon layer (22) deposited and patterned. The modified process is characterized by the absence of any oxide thinning between the first and second polysilicon layers or between the second polysilicon layer and the substrate (10) of the device. As a result, voltage breakdown problems in the individual chips of the wafer are thereby greatly reduced and the yield of the wafer significantly increased.

Fabrication of two-level polysilicon devices

A semiconductor junction-isolated PNPN crosspoint switch array has a plurality of crosspoint switches that are each formed of four regions of alternating conductivity type in a semiconductor substrate. Low enough leakage to allow the crosspoint switch array to be used in large telephone switching systems is achieved by proper selection of the thickness of the semiconductor regions and by appropriate gold doping thereof.

Growing community of inventors

Allentown, PA, United States of America

Richard M Jacobs