Seagate Technology Incorporated

Richard Joseph Bojko

Billy Wayne Crue

Michael Kevin Minor

A recording head for use with magnetic recording media has an improved structure, made by a simplified manufacturing process. The electrically insulating materials within the recording head are inorganic. The insulating materials are vacuum deposited, with no need to use a hard bake process that would be required for use of organic insulators. In one embodiment, the write gap is first masked, and then the coil is deposited on the write gap. A slightly larger area is then exposed within the mask, permitting insulation to be deposited over the coil. In a second embodiment, the coil and associated insulation are deposited and then milled to have a tapered configuration. This recording head also places the writing pole on a very flat surface, thereby allowing plated or deposited films to be easily manufactured to correspond to narrow track widths.

Method of making a recording head

A lithography method combines both high gap resolution and high processing speed. An electron beam sensitive resist is applied to a substrate, followed by a photoresist. The undesired portions of the photoresist are removed through photolithography. An electron beam flood exposure or oxygen ashing is used to remove those portions of the electron beam sensitive resist not protected by the photoresist. An optical flood is used to remove the remaining photoresist. Electron beam lithography is then used to define narrow gaps within the remaining electron beam sensitive resist.

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Minneapolis, MN, United States of America

Richard Joseph Bojko