Silicon Microstructures, Inc.

Custom Sensors & Technologies, Inc.

Richard John August

Michael B Doelle

Randall Jaffe

Igor Leonidovich Tchertkov

Salisbury Edward Henry Aston

Pressure sensors having components with reduced variations due to stresses caused by various layers and components that are included in the manufacturing process. In one example, a first stress in a first direction causes a variation in a component. A second stress in a second direction is applied, thereby reducing the variation in the component. The first and second stresses may be caused by a polysilicon layer, while the component may be a resistor in a Wheatstone bridge.

Compensation of stress effects on pressure sensor components

Dithering mechanism and method for eliminating the effects of zero-rate bias in a rate sensor or gyroscope. Both continuously moving and indexing embodiments are disclosed. The mechanism includes a first part mounted in a fixed position centered about a dither axis perpendicular to the input axis of the gyroscope, a second part disposed coaxially of the first part and affixed to the sensing element of the gyroscope, and a plurality of piezoelectrically driven quartz flexure beams extending radially between the first and second parts for dithering the second part about the dither axis. In some embodiments, the dithering mechanism is formed separately from and affixed to the sensing element of the gyroscope, and in others it is formed integrally with the sensing element. In the indexing embodiments, radial arms and fixed stops limit movement of the mechanism between two fixed positions, and drive signals and holding potentials are applied alternately to dither the mechanism between the two positions and to hold it alternately in those positions during successive data acquisition periods.

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Concord, CA, United States of America

Richard John August