Sap Se

Applied Materials, Inc.

Richard Hong

Peijun Ding

Arvind Sundarrajan

James H Tsung

Gunnar Vatvedt

Imran Hashim

Howard H Tang

Tse-Yong Yao

Allen Thompson

Mark Hourani

In an example embodiment, a dynamic button as a dynamic button user interface element is rendered in a graphical user interface, the dynamic button corresponding to an application action when selected by a user via the graphical user interface. Then, in response to detection of selection of the dynamic button by the user via the graphical user interface, the application action is caused to be executed, producing an application action result, and a visual indication of the application action result is displayed inside the dynamic button user interface element.

Dynamic button with visual indication of application action result

Display screen or portion thereof with a graphical user interface having a transitional icon

Example systems and methods of context-driven information access are presented. In one example, a request for information concerning an application is received from a user device employing the application. Also received from the user device is context information related to execution of the application. Based on the request and the context information, information concerning the application is retrieved. The information concerning the application is then transmitted to the user device while the user device is employing the application. In some examples, this information may also be shared among other user devices.

Context-driven application information access and knowledge sharing

The present invention generally provides a substrate processing system having a thermally conductive and electrically insulative member coupled to a heated member that provides for heat dissipation from the heated member. In a preferred embodiment, the present invention provides for heat dissipation through thermal conductance of an electrically insulated coil in an IMP reaction chamber.

Enhanced cooling IMP coil support

A method and apparatus is provided for clamping and shielding the edge of a substrate useful in electronic device fabrication. A shadow ring is formed by an inward radial extension of the top surface of a generally annular shaped clamp ring. The shadow ring portion overhangs but does not contact the top surface of a substrate being processed. A smoothly tapered substrate contact surface extending from the outer diametrical extent of the shadow ring bottom surface to the bottom surface of the clamp ring is sized and adapted to engage the outer edge of a substrate. The substrate contact surface aligns the clamp ring to a substrate support member and a substrate to the substrate support member and the clamp ring as the substrate is lifted vertically.

Use of tapered shadow clamp ring to provide improved physical vapor deposition system

The present invention generally provides an apparatus and a method for physical vapor deposition of a metal onto a substrate comprising a physical vapor deposition chamber and a target disposed in an upper portion of the chamber. The target comprises a backing plate having a central portion and a flange portion attachable to the physical vapor deposition chamber, a sputterable portion extending from the central portion of the backing plate, and an annular ridge disposed on a surface of the flange portion. Preferably, the sputterable portion of the target includes a restriction side wall that restricts entry of plasma and back-scattered particles into the dark space gap between an upper shield and the target.

Growing community of inventors

San Jose, CA, United States of America

Richard Hong