Advanced Micro Devices Corporation

Globalfoundries Inc.

Richard Good

James Broc Stirton

Matthew A Purdy

Uwe Schulze

Daniel Kost

By dividing a complex set of parameters of a production process in forming semiconductor devices into individual blocks, respective PCA models may be established for each block and may thereafter be combined by operating on summary statistics of each model block in order to evaluate the complete initial parameter set. Thus, compared to conventional strategies, a significant reduction of the size of the combined PCA model compared to a single PCA model may be obtained, while also achieving an enhanced degree of flexibility in evaluating various subsets of parameters.

Method and system for semiconductor process control and monitoring by using PCA models of reduced size

By coordinating a process regime of a process module for sample substrates used in a previously performed metrology process, an increased degree of measurement information may be obtained. For this purpose, the coordination may be based on a sampling ruleset related to the process module, wherein the previously selected sample substrates may be appropriately sequenced through the process module to increase the probability for complying with the associated sampling ruleset. Furthermore, the enhanced process coordination may be advantageously combined with randomization steps, thereby providing a 'pseudo randomization,' in which sample substrates are intentionally positioned, while the remaining substrates may be randomized for decoupling related process steps.

Method and system for randomizing wafers in a complex process line

The present invention provides a method and apparatus for selecting wafers for sampling. The method includes determining a plurality of sampling rules associated with at least one of a plurality of wafers and selecting at least one wafer for sampling based on the plurality of sampling rules.

Method and apparatus for selecting wafers for sampling

An APC controller is configured to operate on a segregated data structure during its normal operation and to establish a control state during an initializing event for a non-initialized manufacturing context on the basis of other initialized or non-initialized manufacturing contexts. Thus, the processing of pilot substrates may be reduced or the processing of the pilot substrates may be initiated on the basis of reliably established process parameters.

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Dresden, Germany

Richard Good