Cymer, Inc.

Other

Maxwell Laboratories, Inc.

The United States of America As Represented by the United States

Spectronic Instruments, Inc.

Richard G Morton

Richard C Ujazdowski

William N Partlo

Richard L Sandstrom

Tom A Watson

Timothy S Dyer

Thomas D Steiger

Bryan George Moosman

Thomas Patrick Duffey

Walter Dale Gillespie

Alexander Igorevich Ershov

Igor Vladimirovich Fomenkov

Richard M Ness

Xiaojiang Jason Pan

Toshihiko Ishihara

Yoshiho Amada

Jean-Marc Hueber

Palash P Das

Peter Clarke Newman

Herve A Besaucele

John T Melchior

Daniel Anthony Rothweil

Kenneth Avicola

Curtis L Rettig

Alex P Ivaschenko

James A Carmichael

Michael C Cates

John R Ross

R Kyle Webb

Thomas Hofmann

John Martin Algots

Thomas A Yager

Eckehard D Onkels

Vladimir B Fleurov

Paul S Thompson

Robert A Shannon

Brian Strate

Joshua C Brown

Robert E Weeks

John P Quitter

Mark R Lewis

Ross H Winnick

Walter Dean Gillespie

David J Warkentin

Steven Merrill Harrington

Donald G Larson

David Wayne Myers

Robert G Ozarski

I Roger Oliver

Fedor Trintchouk

Gamaralalage G Padmabandu

Raymond F Cybulski

James K Howey

Richard H Sawicki

Jiping Zhang

Holger K Glatzel

Zsolt Bor

Paolo Zambon

William N Partio

James H Azzola

Leonard Lublin

Dmitry Berger

Vaughn G Draggoo

Thomas C Blasiak

Elizabeth Marsh

Dmitri V Gaidarenko

Carl E Tedesco, Ii

William J Connally

Horst D Bissinger

John Dunlop

Firas F Putris

Curtis Mixon

Matthew Ball

Michael Du'Lyea

Ken Avicola

B Fleurov Vladimir

A system is disclosed for keeping rats and similar pests away without trapping or killing them. It provides a long-life battery powered LED light system for deterring rats, mice and other nocturnal animals. Embodiments of the present invention are designed to operate continuously for at least one year between battery changes. Embodiments have been proven to deter rats from invading engine compartments of parked motor vehicles, vegetable gardens, attics, garages and outdoor patios. In preferred embodiments the wavelengths of the LEDs are chosen to correspond to the known wavelength sensitivity peaks of the eyes of rats, mice, and other rodents. This new technology transcends traps.

Long-life-light system for deterring rats, mice and similar pets

A method for making a metal fluoride trap including: assembling a precipitation tube assembly including a plurality of precipitation tubes supported between a first tube end support and a second tube end support; assembling a precipitation tube, flowsheet and filter media assembly including: wrapping a flowsheet around at least one full circumference of the plurality of precipitation tubes, wherein the flowsheet has a width less than a length of the plurality of precipitation tubes between the first tube end support and the second tube end support; and wrapping a filter media around the wrapped flowsheet, wherein the filter media and the flowsheet are wrapped so as to have a diameter less than an inner diameter of an outer casing of the metal fluoride trap; inserting the precipitation tube, flowsheet and filter media assembly into the outer casing of the metal fluoride trap; allowing the flowsheet to expand; and pressing the filter media between the flowsheet and an inner surface of the outer casing of the metal fluoride trap. A method of filtering gas in a metal fluoride trap is also disclosed. A metal fluoride trap apparatus is also disclosed.

Metal fluoride trap

A apparatus and method are disclosed which may comprise a fluorine gas discharge laser system and electrode support system which may comprise a first electrode electrically connected to a source of high voltage; a first insulating mechanism insulating the first electrode from ground; a second electrode electrically insulated from the source of high voltage and together with the first electrode forming an elongated discharge region between portions of the first and second electrodes respectively extending along a longitudinal axis of each of the first and second electrodes, defining electrode discharge receiving region end portions; a plurality of current return tines electrically connected to the second electrode and to ground, the tines distributed along the longitudinal extent of the elongated discharge region; a second insulating mechanism electrically isolating the second electrode from ground except through the plurality of current return tines.

Gas discharge laser system electrodes and power supply for delivering electrical energy to same

A fluorine gas discharge laser electrode for a gas discharge laser having a laser gas containing fluorine is disclosed which may comprise a copper and copper alloy cathode body having an upper curved region containing the discharge footprint for the cathode comprising copper and a lower portion comprising a copper alloy, with the facing portion of the electrode if formed in a arcuate shape extending into straight line portions on either side of the arcuate portion, the straight line portions terminating in vertical straight sides, with the boundary between the copper including at least the arcuate portion, the electrode may comprise a bonded element machined from two pieces of material the first made of copper and the second made of a copper alloy bonded together before machining. The electrode may also comprise a first and a second elongated lopsided V-shaped groove formed along substantially all of the elongated electrode body forming a discharge receiving ridge between the first and second lopsided V-shaped grooves, with a differentially faster eroding material filling the first and second lopsided V-shaped grooves. also disclosed is an electrode system in which the one electrode, e.g., the cathode bows during operation and may comprise at least one of a first and second elongated gas discharge electrode being machined to form a crown to receive the gas discharge that compensates for the bowing of at least one of the gas discharge electrodes during operation of the fluorine gas discharge laser.

Cathodes for fluorine gas discharge lasers

A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall. The chamber may comprise a plurality of dust collecting recesses in at least one of the vertical interior wall and the bottom wall of the chamber which may be selected from a group comprising a one-part recess and a multi-part recess, which may comprise two sections angled with respect to each other. The dust trap may comprise a pressure trap positioned between a portion of a main insulator and an interior wall of the chamber. The chamber may comprise a gas circulating fan comprising a cross-flow fan with a fan cutoff that may comprise a vortex control pocket. The chamber may comprise a preionization mechanism comprising a preionization tub containing a ground rod within an elongated opening in the preionization tube that may comprise a compliant member, an automatic preionization shut-off mechanism, a preionization onset control mechanism and/or a focusing element. The chamber may comprise an elongated baffle plate that may comprise a plurality of pyramidal structures including varying numbers of generally pyramidal elements and oriented in groups of varying numbers of generally pyramidal elements and oriented along and transverse to the longitudinal axis. Acoustic resonances within the chamber may also be reduced by introducing an artificial jitter into the timing of the laser discharges varying the inter-pulse period randomly or in a repeating pattern from pulse to pulse within a burst.

Gas discharge laser chamber improvements

A high power narrow band, high repetition rate laser light source optical improvement apparatus and methods are disclosed with a fast angularly positionable mirror having a mirror mounting frame, a reflective optic with a coefficient different from that of the mounting frame, at least one flexure mount fromed in the mounting frame that is flexible having flexure arm attached the flexture to the mounting frame. The apparatus may include a flexure force mechanism having an elongated rod. The force mechanism may pre-stress the flexure. The mirror maybe a grating which includes a substrate with metallic layer formed on the substrate, and a protective coating made of silica formed on the reflective metallic layer. The grating maybe actively tuned using an electro- or magneto-sensitive element. Oxides of the metal in the reflective layer may be removed by a hydrogen purge system exposed to deep ultraviolet radiation.

DUV light source optical element improvements

Fluorine gas discharge laser electrodes and electrode systems that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition electrodes may comprise a first discharge shaping magnet mounted in a first elongated gas discharge electrode and a second discharge shaping magnet mounted in a second elongated gas discharge electrode. Also is an electrode may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode and a pair of elongated high erosion regions on either side of the crown comprising a second material with a relatively higher erosion rate during gas discharge than that of the first material.

Electrodes for fluorine gas discharge lasers

A gas discharge laser includes a laser chamber containing a halogen laser gas, two electrode elements defining a cathode and an anode, each having a discharge receiving region defining two longitudinal edges and having a region width defining a width of an electric discharge between the electrode elements in the laser gas. The anode comprising a first anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region, a pair of second anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an electrode center base portion integral with the first anode portion; and wherein each of the respective pair of second anode portions is mechanically bonded to the center base portion.

Halogen gas discharge laser electrodes

Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode; the crown in traverse cross section having the shape of the upper half of a canted ellipse rotated in the preionizer direction, such that a tangent to the short centerline axis of the ellipse forms an angle with the horizontal. Another embodiment may comprise an anode blade having a top portion and a first and second sidewall portion each intersecting the top portion; the anode blade being formed with the shape in cross section of the top portion being curvilinear and intersecting the generally straight potions of each of first and second sidewall portions along a radius of curvature and with the top portion beveled away from an asymmetric discharge side of the anode.

Anodes for fluorine gas discharge lasers

An excimer laser with a laser chamber containing a circulating laser gas containing fluorine and long-life, annealed, copper alloy electrodes. Electrode lifetime is increased by annealing them after the electrodes are machined. This annealing relieves the surface stress caused by the machining operation and reduces the exposed metallic grain boundary length per unit area on the surface of the electrodes, which provides substantial reduction in erosion caused by fluorine chemical attack. Annealing after machining also reduces the stress throughout the bulk of the electrode material. In preferred embodiments the anode is a copper-aluminum alloy and the cathode is a copper-zinc alloy.

Annealed copper alloy electrodes for fluorine containing gas discharge lasers

The present invention provides a gas discharge laser having at least one long-life elongated electrode for producing at least 12 billion high voltage electric discharges in a fluorine containing laser gas. In a preferred embodiment at least one of the electrodes is comprised of a first material having a relatively low anode erosion rate and a second anode material having a relatively higher anode erosion rate. The first anode material is positioned at a desired anode discharge region of the electrode. The second anode material is located adjacent to the first anode material along at least two long sides of the first material. During operation of the laser erosion occurs on both materials but the higher erosion rate of the second material assures that any tendency of the discharge to spread onto the second material will quickly erode away the second material enough to stop the spread of the discharge. In a preferred embodiment the anode is as described above and the cathode is also a two-material electrode with the first material at the discharge region being C26000 brass and the second material being C36000 brass. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.

High rep-rate laser with improved electrodes

A fluorine gas discharge laser electrode for a gas discharge laser having a laser gas containing fluorine and a method for manufacturing an electrode is disclosed. The electrode may include a copper and copper alloy body having an upper curved region containing a discharge footprint and a lower portion. In one aspect of an embodiment of the present invention, the upper region may include copper and the lower region may include a copper alloy. A portion of the electrode facing a gas discharge region may be formed in an arcuate shape extending into straight line portions on either side of the arcuate portion. The straight line portions may terminate in vertical straight sides.

A laser and method for operating a laser and disclosed. The laser may include a first discharge electrode and a second discharge electrode positioned at a distance from the first electrode. A laserable gas may be provided together with a circulation system to flow the gas into a space between the electrodes. A voltage source may be connected to the electrodes for creating a discharge in the space; and a flow guide having a guide surface in contact with the gas may be provided that is guide selectively moveable relative to the first electrode to guide a flow of gas into the space. In one implementation, the flow guide directs flow toward an extremity of the first electrode and is adjustable to direct flow toward the extremity as the first electrode wears.

Adjustable flow guide to accommodate electrode erosion in a gas discharge laser

A gas discharge laser having an elongated cathode and an elongated anode with a porous insulating layer covering the anode discharge surface. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges. In preferred embodiments at least a portion of the anode is comprised of lead, and fluorine ion sputtering of the anode surface creates the insulating layer (over the discharge surface of the anode) comprised in large part of lead fluoride. In a particular preferred embodiment the anode is fabricated in two parts, a first part having the general shape of a prior art anode with a trench shaped cavity at the top and a second part comprised of lead rich brass and disposed in the trench shape cavity.

Discharge laser with porous layer covering anode discharge surface

Discharge laser with porous insulating layer covering anode discharge surface

Growing community of inventors

San Diego, CA, United States of America

Richard G Morton