Air Products and Chemicals, Inc.

Richard E Howard

Hans-Juergen Graf

Bruce A Lipisko

Robert E Fletcher

John C Schumacher

Adrian Sandu

Joseph P Keene

Peter T Randtke

Peter T Randke

A system for automatically filling a bubbler, or other vapor delivery system from a reservoir, is disclosed in which the conduit system is purged and pressurized with inert gas, using a unique refill reservoir, level sensing and valving system.

Chemical refill system

A disposable container for shipping a hazardous or ultra-high purity liquid material is disclosed, having a body of substantially vapor-impermeable organic polymer material, such as fluorinataed linear high-density polyethylene, a bubbler tube extending from the top of the container having an open end near the bottom of the container, a liquid level detector, and an outlet tube on the top of the container having an open bottom end near the top of the container. A vapor-impermeable metal coating is provided on the outside of the container by vapor deposition or sputtering. A frangible seal is provided at the top of both the inlet tube and the outlet tube. A metal-coated polymer valve is provided on the bubbler, having vapor-impermeable seals isolating the metal exterior from the metal interior, and also having means for rupturing the frangible seal.

Disposable chemical container

A disposable container for shipping a hazardous or ultra-high purity liquid material is disclosed, having a body of substantially vapor-impermeable organic polymer material, such as fluorinated linear high-density polyethylene, a bubbler tube extending from the top of the container having an open end near the bottom of the container, a liquid level detector, and an outlet tube on the top of the container having an open bottom end near the top of the container. A vapor-impermeable metal coating is provided on the outside of the container by vapor deposition or sputtering. A frangible seal is provided at the top of both the inlet tube and the outlet tube. A metal-coated polymer valve is provided on the bubbler, having vapor-impermeable seals isolating the metal exterior from the metal interior, and also having means for rupturing the frangible seal.

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Escondido, CA, United States of America

Richard E Howard