The Boc Group, Inc.

Varian Associates, Inc.

Richard E Demaray

John C Helmer

Ronald R Cochran

Robert L Anderson

Vance E Hoffman, Jr

Young H Park

Gary B Crumley

A magnetron sputter source providing a predetermined erosion distribution over the surface of a sputter target material is described. When the distribution is uniform, close coupling of the sputter target with the substrate to be coated is achieved, resulting in improved collection efficiency of the sputtered material by the wafer and improved film thickness uniformity. Elimination of erosion grooves provide for greater target consumption and longer target life. The cathode magnetron sputter source includes a rotating magnet assembly of a specific shape and a specific magnetic strength provides the desired erosion distribution. The target may be dished to improve uniformity near the periphery of the wafer. The resulting magnetron cathode is used for the deposition of thin films. Further applications of uniform magnetron erosion or preselected erosion include uniform or preselected magnetron sputter etch or reactive ion etch and concurrent deposition and etch.

Rotating sputtering apparatus for selected erosion

A magnetron sputter coating device having a target of material to be sputtered and a magnetic means for producing a closed-loop magnetic tunnel capable of confining a glow discharge adjacent a surface of the target is disclosed. A groove is provided in the surface of the target along at least part of the erosion region. The groove affects the sputtering voltage and profile of the sputtering surfaces as it erodes. The dimensions and locations of the groove can be selected to optimize the effects for particular magnetron sputtering devices.

Magnetron sputtering targets

A method for depositing a coating of a dense ceramic material is disclosed. The coating may be an oxide or other refractory ceramic material. A ceramic starting material is melted and refined by heating with an electron beam in vacuum. The refined material is evaporated and deposited on a heated substrate to form a dense ceramic coating. In particular, a durable ceramic thermal barrier coating on a superalloy turbine part may be formed by coating the part with a metal layer which is oxidized to form alumina and depositing a dense ceramic layer followed by an overcoating of a columnar ceramic material.

Adherent ceramic coatings

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Oakland, CA, United States of America

Richard E Demaray