Mks Instruments, Inc.

Eni Technology, Inc.

Eni Technologies Inc.

Richard E Church

Sean O Harnett

Richard W Brounley

A power generation system including a RF power generator which provides a RF output power. The power distribution system includes a phase-magnitude detector module having a dual logarithmic amplifier phase-magnitude detector. The dual logarithmic amplifier phase-magnitude detector receives current and voltage signals. The dual logarithmic amplifier phase-magnitude detector generates a phase signal that varies in accordance with the phase between the voltage signal and the current signal and a magnitude signal that varies in accordance with the magnitude between the voltage and current signals. A controller receives the phase and magnitude signal and communicates control signals to the matching network.

Dual logarithmic amplifier phase-magnitude detector

The present hot switching method and impedance matching circuit extends the tuning range of matching circuits to include increased power levels. The hot switching method and circuit includes coupling a controlled impedance network between an RF generator output and a plasma chamber input for matching impedances. The controlled impedance network includes an RF switch for switching a predetermined impedance. A device performance characteristic of the RF switch is determined. RF power is applied from the RF generator through the controlled impedance network to the plasma chamber. A signal characteristic of the impedance match is measured. The RF switch is controlled based upon the measured signal characteristic such that the impedance match is driven towards a predetermined matching range. The RF switch is switched any speed based upon the device performance characteristic.

Method of hot switching a plasma tuner

An optical position sensor for a vacuum tuning capacitor employs optic fibers that are positioned adjacent a nut associated with the guide shaft. A threaded lead screw is rotated to lift the nut and move the capacitor from a fully-withdrawn home position to a tuning position. A first fiber has its terminus aligned with the terminus of a second fiber to define a gap. A flag or shutter on the nut is positioned in the gap to block the light path between the fibers when the nut is in the home position, but is out of the gap to allow passage of light otherwise. This produces normally on signaling, giving the position sensor a fail-safe capability. The sensor can be incorporated into a cap or cover of the tuning capacitor.

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Rochester, NY, United States of America

Richard E Church