Nxp B.v.

Richard Dondero

Doug Trotter

A polysilicon silicide stringer fuse is constructed having a narrow width by using an overlay tolerance of the photo stepper tool instead of the minimum critical dimension tolerance of the stepper tool. In an example embodiment, a fuse () for integration within a semiconductor comprises depositing an insulating layer () adjacent to the semiconductor substrate (). A silicon layer () is formed with a first silicon material having a first resistance deposited adjacent the insulating layer (). The silicon layer has a first width. A metal silicide stringer (), having a second resistance different from the first resistance is deposited over a portion of the first silicon material () and having a second width that is less than the first width within at least a portion thereof. The metal silicide conducts current therethrough with approximately the second resistance and agglomerates in response to a programming current other than the conduct current therethrough with a same second resistance.

Growing community of inventors

Albuquerque, NM, United States of America

Richard Dondero