Rasirc, Inc.

Richard Dean Blethen

Jeffrey J Spiegelman

Jian Yang

Daniel Alvarez, Jr

Russell J Holmes

Ericca Lynne Speed

Provided herein are methods, systems, and devices incorporating use of materials to store, ship, and deliver process gases to micro-electronics fabrication processes and other critical process applications.

Method, system, and device for storage and delivery of process gas from a substrate

A system and method of controlling a flow of steam in a steam generator having a heater for heating fluid in a vessel is disclosed. The method includes: delivering the steam from the steam generator to a first side of a filtering membrane; receiving purified steam from a second side of the filtering membrane, the purified steam having a steam flow rate; determining at least one coefficient of a substantially linear mathematical relationship between the steam flow rate of the purified steam and duty cycle; and configuring the steam generator to control: the duty cycle of the heater based on the determined at least one coefficient and a target steam flow rate; and/or the target steam flow rate based on the at least one coefficient and a target duty cycle of the heater.

Methods and devices for producing high purity steam

Methods for the purification of steam, systems for purifying steam, methods for measuring and/or controlling steam flow rates, and uses for purified steam are provide. Also provided are substantially gas-impermeable membranes, such as perfluorinated ionomers (e.g., perfluoroethylene-sulfonic-acid/tetrafluoroethylene membranes), having a high ratio of water vapor permeation relative to gas permeation through the membrane. Also provided are methods of operation of such membranes at relatively high operating temperatures for the purification of steam and for operation of such membranes at relatively low temperature and sub-atmospheric pressures for the purification of steam. In a preferred embodiment, the systemfor purifying steam comprises heaterfor creating a source of a steam feed, and a purification devicefor housing a substantially gas-impermeable membrane. In the operation of system, water, such as deionized water, is added to vesselto provide a source of the steam feed.

Method of producing high purity steam

A fluid connector is provided that allows for the simultaneous sealing of multiple tubes within a single outer shell when an external radial compressive force is applied.

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Vista, CA, United States of America

Richard Dean Blethen